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1. AU2001296655 - Process control methods for use with e-beam fabrication technology

Office Australia
Application Number 2001296655
Application Date 04.10.2001
Publication Number 2001296655
Publication Date 20.12.2001
Publication Kind A
IPC
G01N 21/17
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
17Systems in which incident light is modified in accordance with the properties of the material investigated
G01N 25/72
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
25Investigating or analysing materials by the use of thermal means
72Investigating presence of flaws
G01N 29/24
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
29Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
22Details
24Probes
H01J 37/30
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
30Electron-beam or ion-beam tubes for localised treatment of objects
G01N 21/84
GPHYSICS
01MEASURING; TESTING
NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible or ultra-violet light
84Systems specially adapted for particular applications
Applicants Hrl Laboratories, LLC
Inventors Pepper, David M.
Priority Data 09707444 06.11.2000 US
Title
(EN) Process control methods for use with e-beam fabrication technology
Abstract
(EN)
A method and apparatus for e-beam fabrication of a workpiece (20). A surface of the workpiece is impinged with a e-beam (32) during a manufacturing step in the manufacture of the workpiece. Simultaneously, the workpiece is optically sensed using thermal-wave imaging and/or ultrasound imaging techniques for process control of the workpiece. The e-beam impinging the workpiece in the manufacture of the workpiece provides substantially all the energy needed to be added to the workpiece to perform the optical sensing of the workpiece.

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