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1. AU2001024211 - Confocal imaging

Office Australia
Application Number 24211/01
Application Date 16.11.2000
Publication Number 2001024211
Publication Date 09.08.2001
Publication Kind A
IPC
G PHYSICS
02
OPTICS
B
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
21
Microscopes
G02B 21/00
CPC
G02B 21/004
G02B 21/0024
G02B 21/008
Applicants Agilent Technologies Inc.
Inventors Toh, Peng-Seng
Priority Data 9905676-4 16.11.1999 SG
Title
(EN) Confocal imaging
Abstract
(EN)
A confocal imaging system for imaging a surface. The system includes an area array sensor having rows of sensors for detecting light reflected from the surface, and an optical system arranged to focus light from different focal planes on the surface to different sensor rows of the area array sensor.

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