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1. KR1020090030065 - MICROWAVE GENERATING APPARATUS, CAPABLE OF SELF-LOCKING THE MAGNETRON OSCILLATION FREQUENCY

Office Republic of Korea
Application Number 1020070095379
Application Date 19.09.2007
Publication Number 1020090030065
Publication Date 24.03.2009
Grant Number 1013432180000
Grant Date 18.12.2013
Publication Kind B1
IPC
H01J 23/15
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
23Details of transit-time tubes of the types covered by group H01J25/88
14Leading-in arrangements; Seals therefor
15Means for preventing wave energy leakage structurally associated with tube leading-in arrangements, e.g. filters, chokes, attenuating devices
H01J 23/54
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
23Details of transit-time tubes of the types covered by group H01J25/88
36Coupling devices having distributed capacitance and inductance, structurally associated with the tube, for introducing or removing wave energy
54Filtering devices preventing unwanted frequencies or modes to be coupled to, or out of, the interaction circuit; Prevention of high frequency leakage in the environment
CPC
H01J 37/32192
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
37Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
32Gas-filled discharge tubes, ; e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
32192Microwave generated discharge
H01J 23/15
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
23Details of transit-time tubes of the types covered by group H01J25/00
14Leading-in arrangements; Seals therefor
15Means for preventing wave energy leakage structurally associated with tube leading-in arrangements, e.g. filters, chokes, attenuating devices
H01J 23/54
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
23Details of transit-time tubes of the types covered by group H01J25/00
36Coupling devices having distributed capacitance and inductance, structurally associated with the tube, for introducing or removing wave energy
54Filtering devices preventing unwanted frequencies or modes to be coupled to, or out of, the interaction circuit; Prevention of high frequency leakage in the environment
H01J 23/18
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
23Details of transit-time tubes of the types covered by group H01J25/00
16Circuit elements, having distributed capacitance and inductance, structurally associated with the tube and interacting with the discharge
18Resonators
H01J 2237/0817
HELECTRICITY
01BASIC ELECTRIC ELEMENTS
JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
06Sources
08Ion sources
0815Methods of ionisation
0817Microwaves
Applicants LG ELECTRONICS INC.
엘지전자 주식회사
Inventors BAEK, SEUNG WON
백승원
BAEK, CHAE HYUN
백채현
LEE, YONG SOO
이용수
CHOI, JIN JOO
최진주
Agents 정종옥
조현동
진천웅
Title
(EN) MICROWAVE GENERATING APPARATUS, CAPABLE OF SELF-LOCKING THE MAGNETRON OSCILLATION FREQUENCY
(KO) 마이크로파 발생 장치
Abstract
(EN)
PURPOSE: A microwave generating apparatus is provided to fix the magnetron oscillation frequency by feeding back the microwave signal generated from the magnetron to the magnetron. CONSTITUTION: The magnetron(400) generates the microwave signal through oscillation. A coupler(402) is connected between the magnetron and the load, and receives the microwave signal generated from the magnetron. A bandpass filter(404) passes through only the signal coming under the oscillation frequency band of the magnetron among the microwave signals received in the coupler. The bandpass filter is comprised of the dielectric resonator filter. Each configuration is connected by the coaxial cable or the wave guide. ©KIPO 2009

(KO)
본 발명은 마이크로파 발생 장치에 관한 것으로, 마그네트론(Magnetron) 자체에서 발생시키는 마이크로파 신호를 통해 마그네트론 발진 주파수가 고정되는 셀프 락킹(Self locking)이 이루어지는 마이크로파 발생 장치에 관한 것이다.

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