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1. (JP2015144312) SEMICONDUCTOR DEVICE

Office : Japan
Application Number: 2015077468 Application Date: 06.04.2015
Publication Number: 2015144312 Publication Date: 06.08.2015
Grant Number: 5961302 Grant Date: 01.07.2016
Publication Kind : B2
IPC:
G02F 1/1368
H01L 29/786
G PHYSICS
02
OPTICS
F
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
1
Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
01
for the control of the intensity, phase, polarisation or colour
13
based on liquid crystals, e.g. single liquid crystal display cells
133
Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
136
Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
1362
Active matrix addressed cells
1368
in which the switching element is a three-electrode device
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
29
Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having at least one potential-jump barrier or surface barrier; Capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof
66
Types of semiconductor device
68
controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified, or switched
76
Unipolar devices
772
Field-effect transistors
78
with field effect produced by an insulated gate
786
Thin-film transistors
Applicants: 株式会社半導体エネルギー研究所
Inventors: 本田 達也
Priority Data: 2005300825 14.10.2005 JP
Title: (EN) SEMICONDUCTOR DEVICE
(JA) 半導体装置
Abstract:
(EN) PROBLEM TO BE SOLVED: To obtain a semiconductor device which reduces contact resistance between a semiconductor film and an electrode or wiring, improves the coverage factor between the semiconductor film and the electrode or the wiring, and improves the characteristics.

SOLUTION: A semiconductor device includes: a gate electrode located on a substrate; a gate insulation film located on the gate electrode; a first source electrode or a first drain electrode, located on the gate insulation film; an island-shaped semiconductor film located on the first source electrode or the first drain electrode; and a second source electrode or a second drain electrode, located on the island-shaped semiconductor film and the first source electrode or the first drain electrode. The second source electrode or the second drain electrode is in contact with the first source electrode or the first drain electrode. The first source electrode or the first drain electrode and the second source electrode or the second drain electrode hold the island-shaped semiconductor film therebetween. This invention relates to the semiconductor device and a manufacturing method of the semiconductor device.

COPYRIGHT: (C)2015,JPO&INPIT
(JA)

【課題】半導体膜と電極又は配線との接触抵抗を低減し、かつ半導体膜と電極又は配線と
の被覆率を改善し、特性を向上させた半導体装置を得ることを課題とする。
【解決手段】基板上にゲート電極と、前記ゲート電極上にゲート絶縁膜と、前記ゲート絶
縁膜上に第1のソース電極又はドレイン電極と、前記第1のソース電極又はドレイン電極
上に島状半導体膜と、前記島状半導体膜及び前記第1のソース電極又はドレイン電極上に
第2のソース電極又はドレイン電極とを有し、前記第2のソース電極又はドレイン電極は
前記第1のソース電極又はドレイン電極と接触しており、前記第1のソース電極又はドレ
イン電極及び第2のソース電極又はドレイン電極が前記島状半導体膜を挟みこんでいる半
導体装置及びその作製方法に関するものである。
【選択図】図1


Also published as:
EP1935027JP2007134687US20070087487JP2013016861CN101278403JP2014103418
WO/2007/043493