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1. WO2014157571 - ELECTROSTATIC CHUCK

Available information on National Phase entries(more information)
OfficeEntry DateNational NumberNational Status
China27.03.2014201480017501.9
Republic of Korea15.07.20151020157019021Granted: 18.11.2016
United States of America17.09.201514777879Published: 22.09.2016
Granted: 01.05.2018