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1. WO2020140859 - PHOTOETCHING PROJECTIVE OBJECTIVE

CN111381346Photoetching projection objective lens
Appl.Date 30.12.2018
Appl.No 201811648652.0 Applicant SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD. Pub.Kind A,B
Inclusion Criteria IC5
Sole priority inside the family.
Pub.Date 07.07.2020
WO/2020/140859PHOTOETCHING PROJECTIVE OBJECTIVE
Appl.Date 30.12.2019
Appl.No PCT/CN2019/129760 Applicant SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD. Pub.Kind A Pub.Lang zh
Inclusion Criteria IC1
PCT application from which the family originated.
Pub.Date 09.07.2020
KR1020217023880
Appl.Date 27.07.2021
Appl.No 1020217023880
Inclusion Criteria IC3
National entry of a PCT application not found in PATENTSCOPE.