Please wait...



Goto Application


Disclaimer The image version (PDF) available on PATENTSCOPE is the official version. This online html version is provided to assist users. Despite the great care taken in its compilation to ensure a precise and accurate representation of the data appearing on the printed document/images, errors and/or omissions cannot be excluded due to the data transmittal, conversion and inherent limitations of the (optional) machine translation processes used. Hyperlinks followed by this symbol , are to external resources that are not controlled by WIPO. WIPO disclaims all liability regarding the above points.

Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2019/068270 44016238WO01
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
23 December 2019 02 January 2019
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing filed or furnished:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
The figure of the drawings to be published with the abstract is Figure No.     4    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
none of the figures is to be published with the abstract.


     H01L 21/02 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC


Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility models
Japanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords: silane, boron, nitride, plasma, hydrogen, capacitor


Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
WO 2013-123143 A1 (NOVELLUS SYSTEMS, INC. et al.) 22 August 2013 paragraphs [0004], [0065], [0069], [0083], [0090], [0092], [0118], [0126]-[0127], [0135], [0149], and claims 1-5, 8, 13, 19, 28-29
JP 2010-251654 A (ELPIDA MEMORY INC.) 04 November 2010 claims 1-4 and figures 1, 4
KR 10-2014-0018861 A (APPLIED MATERIALS, INC.) 13 February 2014 claims 1-4 and figure 4
KR 10-2012-0115962 A (NOVELLUS SYSTEMS, INC.) 19 October 2012 the entire document
US 6924241 B2 (TAI-PENG LEE) 02 August 2005 the entire document
Special categories of cited documents:
document defining the general state of the art which is not considered to be of particular relevance
document cited by the applicant in the international application
earlier application or patent but published on or after the international filing date
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
document referring to an oral disclosure, use, exhibition or other means
document published prior to the international filing date but later than the priority date claimed
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
document member of the same patent family


Patent document cited in search report Publication date
Patent family member(s) Publication date
WO 2013-123143 A1
22 August 2013
CN 103119692 A
CN 103119692 B
CN 104220637 A
KR 10-1863364 B1
KR 10-1863388 B1
KR 10-2011-0107758 A
KR 10-2013-0140671 A
KR 10-2018-0062442 A
KR 10-2019-0132304 A
KR 10-2045674 B1
SG 174716 A1
SG 188355 A1
TW 201219595 A
TW 201341569 A
TW I547587 B
US 10214816 B2
US 2011-0236594 A1
US 2011-0236600 A1
US 2012-0142172 A1
US 2013-0157466 A1
US 2013-0171834 A1
US 2015-0013607 A1
US 8709551 B2
US 8741394 B2
US 9028924 B2
WO 2012-036808 A2
WO 2012-036808 A3
22 May 2013
19 October 2016
17 December 2014
04 July 2018
31 May 2018
04 October 2011
24 December 2013
08 June 2018
27 November 2019
02 December 2019
28 October 2011
30 April 2013
16 May 2012
16 October 2013
01 September 2016
26 February 2019
29 September 2011
29 September 2011
07 June 2012
20 June 2013
04 July 2013
15 January 2015
29 April 2014
03 June 2014
12 May 2015
22 March 2012
31 May 2012
JP 2010-251654 A
04 November 2010
KR 10-2014-0018861 A
13 February 2014
CN 103270578 A
CN 103270578 B
JP 2014-505363 A
JP 6104817 B2
TW 201243094 A
TW I553146 B
US 2012-0171391 A1
US 8883269 B2
WO 2012-092020 A2
WO 2012-092020 A3
28 August 2013
26 October 2016
27 February 2014
29 March 2017
01 November 2012
11 October 2016
05 July 2012
11 November 2014
05 July 2012
26 October 2012
KR 10-2012-0115962 A
19 October 2012
JP 2012-238846 A
TW 201308430 A
US 2012-0258261 A1
06 December 2012
16 February 2013
11 October 2012
US 6924241 B2
02 August 2005
TW 200416883 A
TW I223857 B
US 2004-0166696 A1
01 September 2004
11 November 2004
26 August 2004
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
29 April 2020
Date of mailing of the international search report:
29 April 2020
Authorized officer:
PARK, Hye Lyun
Telephone No. +82-42-481-3463
Top    Part 1: 1 2 3 4 5 6         Part 2: A B C D E