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1. WO2002025695 - TUNABLE FOCUS RING FOR PLASMA PROCESSING

International Application Status
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29.07.2021International Application Status ReportHTML, PDF, XMLPDF, XML
Published International Application
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13.06.2002Later publication of international search report( (A3 24/2002))PDF (5p.)PDF (5p.), ZIP(XML + TIFFs)
28.03.2002Initial Publication without ISR( (A2 13/2002))PDF (38p.)PDF (38p.), ZIP(XML + TIFFs)
Search and Examination-Related Documents
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18.03.2003International Preliminary Examination ReportPDF (2p.)PDF (2p.), ZIP(XML + TIFFs)
Related Documents on file at the International Bureau
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28.03.2002Priority DocumentPDF (41p.)PDF (41p.), ZIP(XML + TIFFs)