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1. US20190206709 - WAFER BOX CONVEYOR

Note: Text based on automatic Optical Character Recognition processes. Please use the PDF version for legal matters

[ EN ]

Claims

1. A cassette transport device, comprising: a smart cart; a base expansion frame mounted on the smart cart; and a cassette-loading frame fixed to the base expansion frame, the cassette-loading frame being partitioned into several segments each accommodating a plurality of cassette trays,
wherein each of the plurality of cassette trays defines, on a surface thereof, a first trough and a second trough in the first trough, the first trough being configured to retain a cassette of a first size, the second trough being configured to retain a cassette of a second size.
2. The cassette transport device of claim 1, wherein the second trough is provided with at least two spring-based locking assemblies.
3. The cassette transport device of claim 2, wherein the second trough is provided with four spring-based locking assemblies disposed at respective four corners of the second trough.
4. The cassette transport device of claim 1, wherein the first trough is provided with at least three pin-based locking assemblies.
5. The cassette transport device of claim 4, wherein the first trough is provided with three pin-based locking assemblies disposed to define a triangle.
6. The cassette transport device of claim 1, wherein each of the plurality of cassette trays is provided with at least three stress sensors on a backside thereof, the at least three stress sensors being not arranged on a same line.
7. The cassette transport device of claim 6, wherein each of the plurality of cassette trays is provided with three stress sensors on a backside thereof, the three stress sensors being disposed on a backside of the second trough corresponding to three edges of the second trough.
8. The cassette transport device of claim 1, wherein each of the plurality of cassette trays is further provided with at least one photoelectric sensor on a backside thereof, the at least one photoelectric sensor configured for detecting presence of cassettes.
9. The cassette transport device of claim 1, wherein the cassette-loading frame is provided with RFID sensors for obtaining ID information of cassettes.
10. The cassette transport device of claim 9, wherein each of the RFID sensors comprises two antennas for obtaining ID information of the cassettes, one of the two antennas configured for detecting the cassette of the first size and the other one of the two antennas configured for detecting the cassette of the second size.
11. The cassette transport device of claim 1, wherein a plurality of buffers are disposed between the smart cart and the base expansion frame.
12. The cassette transport device of claim 1, further comprising a plurality of obstacle avoidance sensors.
13. The cassette transport device of claim 12, the plurality of obstacle avoidance sensors comprises: ultrasonic sensors, horizontal sensors and vertical sensors, the ultrasonic sensors being disposed in symmetry on front and rear sides of the base expansion frame that oppose each other along a direction in which the smart cart travels, the horizontal sensors being disposed in symmetry on left and right sides of the base expansion frame, the vertical sensors being disposed in symmetry on left and right sides of the cassette-loading frame.
14. The cassette transport device of claim 1, wherein the first size is 12 inch and the second size is 8 inch.