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1. (WO2007010011) OPTICAL ELEMENT MODULE

Pub. No.:    WO/2007/010011    International Application No.:    PCT/EP2006/064427
Publication Date: Jan 25, 2007 International Filing Date: Jul 19, 2006
IPC: G03F 7/20
G02B 7/00
Applicants: Carl Zeiss SMT AG
BISCHOFF, Thomas
FEDERAU, Hagen
HEINTEL, Willi
WÜSTHOFF, Bernd
WIELAND, Jochen
Inventors: BISCHOFF, Thomas
FEDERAU, Hagen
HEINTEL, Willi
WÜSTHOFF, Bernd
WIELAND, Jochen
Title: OPTICAL ELEMENT MODULE
Abstract:
An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.