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1. (WO2018012076) ELECTROMAGNETIC WAVE DETECTOR AND ELECTROMAGNETIC WAVE DETECTOR ARRAY

Pub. No.:    WO/2018/012076    International Application No.:    PCT/JP2017/015832
Publication Date: Fri Jan 19 00:59:59 CET 2018 International Filing Date: Fri Apr 21 01:59:59 CEST 2017
IPC: H01L 31/111
Applicants: MITSUBISHI ELECTRIC CORPORATION
三菱電機株式会社
Inventors: OGAWA, Shimpei
小川 新平
FUJISAWA, Daisuke
藤澤 大介
SHIMATANI, Masaaki
嶋谷 政彰
OKUDA, Satoshi
奥田 聡志
Title: ELECTROMAGNETIC WAVE DETECTOR AND ELECTROMAGNETIC WAVE DETECTOR ARRAY
Abstract:
An electromagnetic wave detector which photoelectrically converts and detects an electromagnetic wave incident on a graphene layer comprises: a substrate having a front surface and a back surface; a lower insulating layer provided on the front surface of the substrate; a ferroelectric layer and a pair of electrodes provided on the lower insulating layer, said pair of electrodes being arranged to so as to face each other with the ferroelectric layer being sandwiched therebetween; an upper insulating layer provided on the ferroelectric layer; and a graphene layer arranged on the lower insulating layer and the upper insulating layer so as to connect the two electrodes. Alternatively, this electromagnetic wave detector comprises: a graphene layer provided on the lower insulating layer; and a ferroelectric layer provided on the graphene layer with an upper insulating layer being interposed therebetween and a pair of electrodes provided on the graphene layer so as to face each other with the ferroelectric layer being sandwiched therebetween. A surface of the graphene layer, said surface being on the reverse side of the lower insulating layer-side surface, serves as an electromagnetic wave incident surface; and the polarization value of the ferroelectric layer is changed by means of an electromagnetic wave and a voltage is applied to the graphene layer.