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1. WO2020133782 - DRY ETCHING MACHINE AND DRY ETCHING METHOD

CN109755159Dry etching machine table and method
Appl.Date 29.12.2018
Appl.No 201811646355.2 Applicant WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. Pub.Kind A,B
Inclusion Criteria IC5
Sole priority inside the family.
Pub.Date 14.05.2019
WO/2020/133782DRY ETCHING MACHINE AND DRY ETCHING METHOD
Appl.Date 02.04.2019
Appl.No PCT/CN2019/081065 Applicant WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. Pub.Kind A Pub.Lang zh
Inclusion Criteria IC1
PCT application from which the family originated.
Pub.Date 02.07.2020