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1. WO2020135971 - SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/EP2019/083027 2018P00299WO
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
29 November 2019 28 December 2018
Applicant
ASML NETHERLANDS B.V.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     8A-E    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     G03F 7/20 (2006.01)i; H01L 21/683 (2006.01)i; H01L 21/687 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
     G03F; H01L
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
EPO-Internal, WPI Data

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2017312826 A1 (LAFARRE RAYMOND WILHELMUS LOUIS [NL] ET AL) 02 November 2017 (2017-11-02)
1-8,11,13-15
Y
paragraphs [0098] - [0105], [0116] - [0120], [0135] - [0141]; figures 11,17A-18C
9,10,12,16
(2)
X
US 2018190534 A1 (POIESZ THOMAS [NL] ET AL) 05 July 2018 (2018-07-05)
14
paragraphs [0089] - [0098]; figures 2,3
(3)
Y
US 2006006340 A1 (COMPEN RENE THEODORUS P [NL]) 12 January 2006 (2006-01-12)
12,16
paragraphs [0070] - [0074]; figures 2,5
(4)
Y
WO 2018007498 A1 (STICHTING NEDERLANDSE WETENSCHAPPELIJK ONDERZOEK INST [NL] ET AL.) 11 January 2018 (2018-01-11)
9,10
A
paragraphs [0092] - [0102], [0107]
1,2
(5)
Y
US 5923408 A (TAKABAYASHI YUKIO [JP]) 13 July 1999 (1999-07-13)
12,16
column 6, line 16 - column 7, line 5
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2017312826 A1
02 November 2017
CN 104081285 A
CN 104272190 A
CN 109254501 A
CN 109298602 A
CN 109375474 A
EP 2810127 A1
EP 2810128 A2
EP 3550364 A1
JP 5957540 B2
JP 6085616 B2
JP 6317785 B2
JP 6609341 B2
JP 2015507367 A
JP 2015508229 A
JP 2016187046 A
JP 2018117153 A
KR 20140114430 A
US 2014368804 A1
US 2015029485 A1
US 2016377994 A1
US 2017036272 A1
US 2017312826 A1
US 2019224755 A1
WO 2013113568 A2
WO 2013113569 A1
01 October 2014
07 January 2015
22 January 2019
01 February 2019
22 February 2019
10 December 2014
10 December 2014
09 October 2019
27 July 2016
22 February 2017
25 April 2018
20 November 2019
05 March 2015
16 March 2015
27 October 2016
26 July 2018
26 September 2014
18 December 2014
29 January 2015
29 December 2016
09 February 2017
02 November 2017
25 July 2019
08 August 2013
08 August 2013
US 2018190534 A1
05 July 2018
EP 3317726 A1
JP 2018521344 A
NL 2016873 A
TW 201704894 A
US 2018190534 A1
WO 2017001135 A1
09 May 2018
02 August 2018
17 January 2017
01 February 2017
05 July 2018
05 January 2017
US 2006006340 A1
12 January 2006
JP 4454552 B2
JP 2006024954 A
SG 119277 A1
US 2006006340 A1
21 April 2010
26 January 2006
28 February 2006
12 January 2006
WO 2018007498 A1
11 January 2018
CN 109791363 A
EP 3482259 A1
JP 2019522236 A
KR 20190025712 A
NL 2019191 A
TW 201803011 A
US 2019332015 A1
WO 2018007498 A1
21 May 2019
15 May 2019
08 August 2019
11 March 2019
11 January 2018
16 January 2018
31 October 2019
11 January 2018
US 5923408 A
13 July 1999
KR 970059842 A
US 5923408 A
12 August 1997
13 July 1999
Name and mailing address of the ISA/:
European Patent Office
P.B. 5818, Patentlaan 2, 2280 HV Rijswijk,
Netherlands
Telephone No. (+31-70)340-2040
Facsimile No. (+31-70)340-3016
Date of the actual completion of the international search:
06 February 2020
Date of mailing of the international search report:
20 February 2020
Authorized officer:
Roesch, Guillaume
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