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1. WO2009006162 - MEMS DEVICES HAVING IMPROVED UNIFORMITY AND METHODS FOR MAKING THEM

Available information on National Phase entries(more information)
OfficeEntry DateNational NumberNational Status
China 25.06.2008200880023004.4
India 11.12.20098120/DELNP/2009Published: 09.07.2010
Japan 04.01.20102010515084