Processing

Please wait...

Settings

Settings

Goto Application

1. WO2021058720 - A PLASMA DEVICE AND A METHOD FOR GENERATING A PLASMA

Note: Text based on automatic Optical Character Recognition processes. Please use the PDF version for legal matters

[ EN ]
CLAIMS

1. A plasma device (10, 40, 50, 60) comprising:

a mounting support (11),

at least one first lever (12) rotatably mounted on the mounting support (11),

at least one second lever (13) rotatably mounted on the at least one first lever (12), and

a first electrode (14) attached to the at least one second lever (13).

2. The plasma device (10, 40, 50, 60) as claimed in claim 1, wherein at least one first spacer (24, 34) is movably mounted on the first electrode (14) and configured to provide a predetermined distance of the first electrode

(14) from a work piece (18).

3. The plasma device (10, 40, 50, 60) as claimed in claim 1 or 2, further comprising a second electrode (15) attached to the at least one second lever (13).

4. The plasma device (10, 40, 50, 60) as claimed in claim 3, wherein at least one second spacer (24, 34) is movably mounted on the second electrode (15) and configured to provide a predetermined distance of the second electrode

(15) from the work piece (18).

5. The plasma device (10, 40, 50, 60) as claimed in one of the preceding claims, further comprising at least one third lever rotatably mounted on the at least one second lever (13), wherein a third electrode is attached to the at least one third lever.

6. The plasma device (10, 40, 50, 60) as claimed in one of the preceding claims, further comprising at least one fourth lever rotatably mounted on one of the at least one first, second and third levers, wherein a probe and/or a measurement tool are attached to the at least one fourth lever.

7. The plasma device (10, 40, 50, 60) as claimed in one of the preceding claims, wherein the cross-section of the outer surface of the first electrode (14) is at least partially round.

8. The plasma device (10, 40, 50, 60) as claimed in one of the preceding claims, wherein a tube (23, 33) made of a dielectric material covers the first electrode (22).

9. The plasma device (10, 40, 50, 60) as claimed in claim 2 and 8, wherein the at least one first spacer is at least one ring (24) movably mounted on the tube (23).

10. The plasma device (60) as claimed in claim 9, wherein at least one guiding element (62) is attached to the at least one second lever (13) and is configured to guide the at least one ring (24).

11. The plasma device (10, 40, 50, 60) as claimed in claim 2 and 8, wherein the tube (33) is movably mounted on the first electrode (22) and the at least one first spacer is at least one rib (34) protruding from the surface of the tube (33).

12. The plasma device (10, 40, 50, 60) as claimed in one of the preceding claims, wherein the at least one first lever is a pair of first levers (12) and the at least one second lever is a pair of second levers (13).

13. The plasma device (10, 40, 50, 60) as claimed in one of the preceding claims, further comprising a driving unit to move the work piece (18) with respect to the mounting support (11).

14. The plasma device (10, 40, 50, 60) as claimed in one of the preceding claims, wherein the mounting support (11) is configured such that the position of a pivot point (16) of the first lever (12) is adjustable.

15. The plasma device (10, 40, 50, 60) as claimed in one of the preceding claims, wherein the length of the first lever (12) is adjustable.

16. A method for generating a plasma by means of a plasma device (10, 40, 50, 60) as claimed in one of the preceding claims, wherein:

at least the first electrode (14) generates a plasma, and the first electrode (14) glides over a surface of a work piece (18) while the work piece (18) is moved with respect to the mounting support (11).