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1. EP3722878 - FAST SCAN EXPOSURE METHOD BASED ON DMD

Note: Text based on automatic Optical Character Recognition processes. Please use the PDF version for legal matters

[ EN ]
Claims

1. A rapid scanning exposure method based on a digital micro mirror device (DMD), applicable for an exposure device, the exposure device comprising a laser, the DMD, an objective lens, a substrate, and a precision platform, and the scanning exposure method comprising the following operations:

S100, controlling light emitted by the laser to irradiate onto the DMD, to be reflected through the DMD into the objective lens, and to be imaged on the substrate on the precision platform;

S200, controlling the precision platform to make a uniform motion in a first direction and to generate pulse signals equidistantly with a set scanning step, and to make a stepping motion or not make a motion in a second direction perpendicular to the first direction;

S300, refreshing a pattern when the DMD detects the pulse signal, and adjusting an angle of deflection of micro mirrors of the DMD before a next pulse signal is detected, to reflect the light emitted by the laser outside the objective lens.


  2. The method of claim 1, wherein the pulse signal of the precision platform is low level or high level.
  3. The method of claim 1, wherein the DMD starts to refresh the pattern when detecting a rising edge or a falling edge of the pulse signal.
  4. The method of claim 1, wherein the scanning step of the precision platform is not greater than an effective display height of the DMD after the DMD is imaged on the substrate.
  5. The method of claim 1, wherein after refreshing the pattern when the DMD detects the pulse signal of the precision platform, and before the next pulse signal of the precision platform is detected, a delay duration of adjusting the angle of deflection of the micro mirrors of the DMD to reflect the light emitted by the laser outside the objective lens, is adjustable.
  6. The method of claim 1, wherein the DMD comprises:

a micro-mirror body, in which the micro-mirror body is switchable between an open state and a closed state, the micro-mirror body is configured to reflect the light emitted by the laser into the objective lens when the micro-mirror body is under the open state, and to reflect the light emitted by the laser outside the objective lens when the micro-mirror body is under the closed state; and

a memory configured to control the angle of deflection of the micro-mirror body, and to control the micro-mirror body to switch between the open state and the closed state based on a result of stored data.


  7. The method of claim 6, wherein the memory has stored data 1 and data 0, and a method of refreshing the pattern by the DMD comprises:

when the memory detects the pulse signal and has stored the data 1, activating the micro-mirror body to the open state; and

when the memory detects the pulse signal and has stored the data 0, activating the micro-mirror body to the closed state.


  8. The method of claim 7, wherein when the micro-mirror body is under the open state, the angle of deflection of the micro-mirror body is an angle of +Θ; and when the micro-mirror body is under the closed state, the angle of deflection of the micro-mirror body is an angle of -Θ.
  9. The method of claim 8, wherein the micro-mirror body further comprises a leveling state; and when the micro-mirror body is under the leveling state, the angle of deflection of the micro-mirror body is an angle of 0, and the micro-mirror body reflects the light emitted by the laser outside the objective lens.
  10. The method of claim 6, wherein a method of reflecting the light emitted by the laser through the micro-mirror body outside the objective lens comprises:
activating the micro-mirror body to the leveling state through the DMD based on a leveling command, or activating the micro-mirror body to the leveling state by loading the data 0 into the memory.