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1. WO2022008224 - COATING DEVICE FOR DEPOSITING A COATING MATERIAL ON A SUBSTRATE

Publication Number WO/2022/008224
Publication Date 13.01.2022
International Application No. PCT/EP2021/066897
International Filing Date 22.06.2021
IPC
C23C 14/24 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
C23C 14/32 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
24Vacuum evaporation
32by explosion; by evaporation and subsequent ionisation of the vapours
C23C 14/56 2006.1
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
22characterised by the process of coating
56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
Applicants
  • THYSSENKRUPP STEEL EUROPE AG [DE]/[DE]
Inventors
  • SCHAUER-PASS, Janine-Christina
  • SCHWERDT, Christian
  • STRACK, Michael
  • GIORGIO, Maurizio
  • TOPALSKI, Slavcho
  • DR. ZWICK, Axel
  • ROCH, Teja
Agents
  • ZENZ PATENTANWÄLTE PARTNERSCHAFT MBB
Priority Data
10 2020 118 015.208.07.2020DE
Publication Language German (de)
Filing Language German (DE)
Designated States
Title
(DE) BESCHICHTUNGSVORRICHTUNG ZUM ABLAGERN EINES BESCHICHTUNGSMATERIALS AUF EINEM SUBSTRAT
(EN) COATING DEVICE FOR DEPOSITING A COATING MATERIAL ON A SUBSTRATE
(FR) DISPOSITIF DE REVÊTEMENT POUR DÉPOSER UN MATÉRIAU DE REVÊTEMENT SUR UN SUBSTRAT
Abstract
(DE) Die Erfindung richtet sich auf eine Beschichtungsvorrichtung (1), aufweisend eine Vakuumkammer (8), einen Tiegel (6), wenigstens einen Spritzkopf (7) zum Aufbereiten des Beschichtungsmaterials und ein Injektor-Rohr (5), wobei das Injektor-Rohr (5) das aufbereitete Beschichtungsmaterial zu dem Tiegel (6) leitend ausgebildet und mit dem Tiegel (6) verbunden ist, wobei der wenigstens eine Spritzkopf (7) zwischen einer Betriebsstellung, in welcher der Spritzkopf (7) das Injektor-Rohr (5) mit dem aufbereiteten Beschichtungsmaterial versorgt, und einer Entnahmestellung bewegbar ist, und wobei wenigstens eine von außerhalb der Vakuumkammer (8) zugänglich ausgebildete Entnahmekammer (12) vorgesehen ist, welche gegenüber der Vakuumkammer (8) abdichtbar ist und in welcher der wenigstens eine Spritzkopf (7) in seiner Entnahmestellung gegenüber der Vakuumkammer (8) gasdicht separiert angeordnet ist.
(EN) The invention relates to a coating device (1) having a vacuum chamber (8), a crucible (6), at least one spray head (7) for providing the coating material, and an injector tube (5). The injector tube (5) is designed to conduct the provided coating material to the crucible (6) and is connected to the crucible (6), and the at least one spray head (7) can be moved between an operating position, in which the spray head (7) supplies the injector tube (5) with the provided coating material, and a removal position. At least one removal chamber (12) is provided which is designed to be accessible from outside the vacuum chamber (8) and which can be sealed off from the vacuum chamber (8) and is equipped with the at least one spray head (7) such that the spray head is separated from the vacuum chamber (8) in a gas-tight manner in the removal position.
(FR) L'invention concerne un dispositif de revêtement (1) comprenant une chambre à vide (8), un creuset (6), au moins une tête de pulvérisation (7) pour fournir le matériau de revêtement, et un tube d'injecteur (5). Le tube d'injecteur (5) est conçu pour conduire le matériau de revêtement fourni vers le creuset (6) et est relié au creuset (6), et l'au moins une tête de pulvérisation (7) peut être déplacée entre une position de fonctionnement, dans laquelle la tête de pulvérisation (7) alimente le tube d'injecteur (5) avec le matériau de revêtement fourni, et une position de retrait. Au moins une chambre de retrait (12) est fournie et est conçue pour être accessible depuis l'extérieur de la chambre à vide (8), et peut être fermée hermétiquement par rapport à la chambre à vide (8) et est équipée de l'au moins une tête de pulvérisation (7) de sorte que la tête de pulvérisation est séparée de la chambre à vide (8) de manière étanche aux gaz dans la position de retrait.
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