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1. WO2021080783 - SUBLIMATION AMPOULE WITH LEVEL SENSING

Publication Number WO/2021/080783
Publication Date 29.04.2021
International Application No. PCT/US2020/054826
International Filing Date 08.10.2020
IPC
C23C 16/448 2006.01
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition (CVD) processes
44characterised by the method of coating
448characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
CPC
C23C 16/4481
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
16Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
44characterised by the method of coating
448characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
4481by evaporation using carrier gas in contact with the source material
G01F 23/265
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
23Indicating or measuring liquid level, or level of fluent solid material, e.g. indicating in terms of volume, indicating by means of an alarm
22by measurement of physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
26by measuring variations of capacity or inductance of capacitors or inductors arising from the presence of liquid or fluent solid material in the electric or electromagnetic fields
263using capacitors
265for discrete levels
G01F 23/2921
GPHYSICS
01MEASURING; TESTING
FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
23Indicating or measuring liquid level, or level of fluent solid material, e.g. indicating in terms of volume, indicating by means of an alarm
22by measurement of physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
28by measuring the variations of parameters of electric or acoustic waves applied directly to the liquid or fluent solid material
284Electromagnetic waves
292Light ; , e.g. infra-red or ultra-violet
2921for discrete levels
Applicants
  • ENTEGRIS, INC. [US]/[US]
Inventors
  • GREGG, John N.
  • NAITO, Donn K.
  • BATTLE, Scott L.
Agents
  • AMICI, Robert M.
Priority Data
16/682,65813.11.2019US
62/925,31324.10.2019US
Publication Language English (EN)
Filing Language English (EN)
Designated States
Title
(EN) SUBLIMATION AMPOULE WITH LEVEL SENSING
(FR) AMPOULE DE SUBLIMATION À DÉTECTION DE NIVEAU
Abstract
(EN)
A solids delivery ampule includes an ampule body defining an interior space. The interior space contains one or more solids support, and each solids support configured to support a quantity of a sublimation solid. The solids delivery ampule also includes a vapor outlet ports, one or more level sensor ports, and one or more level sensors. Each of the one or more level sensors extending through the one or more level sensor port into the interior space. Each of the one or more level sensors measures the quantity of the sublimation solid in each solids support.
(FR)
L'invention concerne une ampoule de distribution de solides qui comprend un corps d'ampoule définissant un espace intérieur. L'espace intérieur contient un ou plusieurs supports de solides, et chaque support de solides est configuré pour supporter une quantité d'un solide de sublimation. L'ampoule de distribution de solides comprend également des orifices de sortie de vapeur, un ou plusieurs orifices de capteur de niveau, et un ou plusieurs capteurs de niveau. Chacun des un ou plusieurs capteurs de niveau s'étend à travers les un ou plusieurs orifices de capteur de niveau dans l'espace intérieur. Chacun des un ou plusieurs capteurs de niveau mesure la quantité du solide de sublimation dans chaque support de solides.
Also published as
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