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1. JP2014532289 - リソグラフィー用途用の小分子由来の金属酸化物フィルム

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JP0006109164B9JP2017013XML, PDF, ZIP(XML + TIFFs)
JP2014532289T5JP2017006XML, PDF, ZIP(XML + TIFFs)
JP2014532289TJP2014066XML, PDF, ZIP(XML + TIFFs)