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1. WO2020141071 - METHOD FOR CALIBRATING A SCANNING CHARGED PARTICLE MICROSCOPE

WO/2020/141071METHOD FOR CALIBRATING A SCANNING CHARGED PARTICLE MICROSCOPE
Appl.Date 17.12.2019
Appl.No PCT/EP2019/085710 Applicant ASML NETHERLANDS B.V. Pub.Kind A Pub.Lang en
Inclusion Criteria IC1
PCT application from which the family originated.
Pub.Date 09.07.2020
CN113228222用于校准扫描带电粒子显微镜的方法
Appl.Date 17.12.2019
Appl.No 201980087240.0 Applicant ASML荷兰有限公司 Pub.Kind A
Inclusion Criteria IC2
National entry of a PCT application.

If this application is not visible in the National Phase tab of the PCT application, its relationship to the PCT application is identified from the PCT or regional filing or publication information of its bibliographic data.

Pub.Date 06.08.2021
KR1020210096226스캐닝 하전 입자 현미경 교정 방법
Appl.Date 17.12.2019
Appl.No 1020217020438 Applicant 에이에스엠엘 네델란즈 비.브이. Pub.Kind A
Inclusion Criteria IC2
National entry of a PCT application.

If this application is not visible in the National Phase tab of the PCT application, its relationship to the PCT application is identified from the PCT or regional filing or publication information of its bibliographic data.

Pub.Date 04.08.2021
US20200211819METHOD FOR CALIBRATING A SCANNING CHARGED PARTICLE MICROSCOPE
Appl.Date 30.12.2019
Appl.No 16730848 Applicant ASML Netherlands B.V. Pub.Kind A1
Inclusion Criteria IC4
US application related to another US application already included in the family.

The former is either a division, continuation, reissue or republication of the latter.

Pub.Date 02.07.2020