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International application No. Applicant's or agent's file reference
PCT/US2020/053954 44017307WO01
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
02 October 2020 04 October 2019
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
The figure of the drawings to be published with the abstract is Figure No.     8    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
none of the figures is to be published with the abstract.


     C23C 16/455 (2006.01)i; H01J 37/32 (2006.01)i; H01L 21/67 (2006.01)i; H01L 21/687 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC


Minimum documentation searched (classification system followed by classification symbols):
     C23C 16/455 (2006.01); B05B 1/00 (2006.01); C23C 16/44 (2006.01); H01L 21/00 (2006.01); H01L 21/205 (2006.01); H04N 9/00 (2006.01)
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility models
Japanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords: gas distribution, quartz plate, nut, clamp, opening, spring, screw


Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
US 5451290 A (SALFELDER, JOSEPH F.) 19 September 1995 (1995-09-19)
column 3, line 24 - column 4, line 3 and figures 2-6
KR 10-2013-0029938 A (SFA ENGINEERING CORP.) 26 March 2013 (2013-03-26)
paragraphs [0072], [0075], [0078] and figure 3
KR 10-2011-0058393 A (K.C.TECH CO., LTD.) 01 June 2011 (2011-06-01)
paragraphs [0024], [0028]-[0034], [0041], claim 10, and figures 1-3
US 2014-0246521 A1 (TINER ET AL.) 04 September 2014 (2014-09-04)
paragraphs [0039]-[0048] and figures 1-3B
WO 2004-064407 A2 (APPLIED MATERIALS, INC.) 29 July 2004 (2004-07-29)
paragraphs [0053]-[0055] and figures 6-8B
Special categories of cited documents:
document defining the general state of the art which is not considered to be of particular relevance
document cited by the applicant in the international application
earlier application or patent but published on or after the international filing date
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
document referring to an oral disclosure, use, exhibition or other means
document published prior to the international filing date but later than the priority date claimed
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
document member of the same patent family


Patent document cited in search report Publication date
Patent family member(s) Publication date
US 5451290 A
19 September 1995
EP 0413239 A2
EP 0413239 B1
JP 03-175627 A
KR 10-0160288 B1
20 February 1991
10 January 1996
30 July 1991
01 February 1999
KR 10-2013-0029938 A
26 March 2013
KR 10-1352923 B1
22 January 2014
KR 10-2011-0058393 A
01 June 2011
KR 10-1111755 B1
13 March 2012
US 2014-0246521 A1
04 September 2014
CN 102933743 A
CN 102933743 B
CN 105463409 A
CN 105463409 B
JP 2013-533388 A
JP 2016-211075 A
JP 5937591 B2
JP 6466364 B2
KR 10-1831667 B1
KR 10-2013-0115083 A
TW 201207905 A
TW I523079 B
US 10087524 B2
US 2012-0027918 A1
US 8721791 B2
WO 2012-015578 A1
13 February 2013
16 December 2015
06 April 2016
12 June 2018
22 August 2013
15 December 2016
22 June 2016
06 February 2019
23 February 2018
21 October 2013
16 February 2012
21 February 2016
02 October 2018
02 February 2012
13 May 2014
02 February 2012
WO 2004-064407 A2
29 July 2004
CN 1735956 A
JP 2006-513323 A
KR 10-0663799 B1
KR 10-2004-0063828 A
TW 200416297 A
US 2004-0129211 A1
US 7270713 B2
WO 2004-064407 A3
15 February 2006
20 April 2006
03 January 2007
14 July 2004
01 September 2004
08 July 2004
18 September 2007
09 December 2004
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon, 35208
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
18 March 2021
Date of mailing of the international search report:
18 March 2021
Authorized officer:
BAHNG, Seung Hoon
Telephone No. +82-42-481-5560
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