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1. WO1997023945 - LOW VOLTAGE ELECTROSTATIC CLAMP FOR SUBSTRATES SUCH AS DIELECTRIC SUBSTRATES

Available information on National Phase entries(more information)
OfficeEntry DateNational NumberNational Status
Japan 22.06.19981997523888
European Patent Office 10.07.19981996945445Published: 02.12.1998
Granted: 26.02.2003