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1. WO1997023945 - LOW VOLTAGE ELECTROSTATIC CLAMP FOR SUBSTRATES SUCH AS DIELECTRIC SUBSTRATES

US5838529Low voltage electrostatic clamp for substrates such as dielectric substrates
Appl.Date 22.12.1995
Appl.No 08577382 Applicant LAM Research Corporation Related Type IC5
Sole priority inside the family.
Pub.Kind A Pub.Lang en
Pub.Date 17.11.1998
EP0880818LOW VOLTAGE ELECTROSTATIC CLAMP FOR SUBSTRATES SUCH AS DIELECTRIC SUBSTRATES
Appl.Date 20.12.1996
Appl.No 96945445 Applicant LAM RES CORP Related Type IC2
National entry of a PCT application.

If this application is not visible in the National Phase tab of the PCT application, its relationship to the PCT application is identified from the PCT or regional filing or publication information of its bibliographic data.

Pub.Kind A1,B1 Pub.Lang en
Pub.Date 02.12.1998
JP2000502509絶縁性基板のような基板用の低電圧静電クランプ
Appl.Date 20.12.1996
Appl.No 1997523888 Related Type IC2
National entry of a PCT application.

If this application is not visible in the National Phase tab of the PCT application, its relationship to the PCT application is identified from the PCT or regional filing or publication information of its bibliographic data.

Pub.Kind A,A5,B2 Pub.Lang ja
Pub.Date 29.02.2000
WO/1997/023945LOW VOLTAGE ELECTROSTATIC CLAMP FOR SUBSTRATES SUCH AS DIELECTRIC SUBSTRATES
Appl.Date 20.12.1996
Appl.No PCT/US1996/020883 Applicant LAM RESEARCH CORPORATION Related Type IC1
PCT application from which the family originated.
Pub.Kind A Pub.Lang en
Pub.Date 03.07.1997