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1. WO2020140202 - METHOD FOR FORMING DUAL DAMASCENE INTERCONNECT STRUCTURE


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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/CN2019/070118 P2019TC684
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
02 January 2019
Applicant
YANGTZE MEMORY TECHNOLOGIES CO., LTD.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     19    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
     H01L
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
CNPAT,EPODOC,WPI,CNKI,IEEE: dual damascene, hole, via, wide, widen, wider, enlarge, trimming, trench, groove, recess, mask, resist, opening, window

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2003216052 A1 (FUJITSU LIMITED) 20 November 2003 (2003-11-20)
11-20
description, paragraphs [0004]-[0027], and figures 12-17
(2)
Y
US 2003216052 A1 (FUJITSU LIMITED) 20 November 2003 (2003-11-20)
1-10
description, paragraphs [0004]-[0027], and figures 12-17
(3)
Y
US 2007287247 A1 (TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.) 13 December 2007 (2007-12-13)
1-10
description, paragraphs [0023]-[0025], [0029], and figures 2, 6
(4)
X
KR 20050032308 A (MAGNACHIP SEMICONDUCTOR LTD.) 07 April 2005 (2005-04-07)
11-20
line 3 in page 2 to line 2 in page 4, figures 1-7
(5)
Y
KR 20050032308 A (MAGNACHIP SEMICONDUCTOR LTD.) 07 April 2005 (2005-04-07)
1-10
line 3 in page 2 to line 2 in page 4, figures 1-7
(6)
A
CN 1505832 A (LAM RES. CORP.) 16 June 2004 (2004-06-16)
1-20
the whole document
(7)
A
KR 20060065184 A (MAGNACHIP SEMICONDUCTOR LTD.) 14 June 2006 (2006-06-14)
1-20
the whole document
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"D"
document cited by the applicant in the international application
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2003216052 A1
20 November 2003
US 6878619 B2
JP 2003332337 A
JP 4034115 B2
12 April 2005
21 November 2003
16 January 2008
US 2007287247 A1
13 December 2007
US 8188527 B2
TW 200746391 A
CN 100505269 C
TW I355734 B
CN 101086992 A
29 May 2012
16 December 2007
24 June 2009
01 January 2012
12 December 2007
KR 20050032308 A
07 April 2005
None
CN 1505832 A
16 June 2004
KR 100883291 B1
JP 2010219550 A
JP 2004528711 A
TW 546737 B
US 6617257 B2
WO 02080234 A3
AU 2002248539 A1
EP 1374288 A2
WO 02080234 A2
KR 20040007480 A
CN 100358107 C
US 2002182881 A1
JP 4813755 B2
11 February 2009
30 September 2010
16 September 2004
11 August 2003
09 September 2003
01 May 2003
15 October 2002
02 January 2004
10 October 2002
24 January 2004
26 December 2007
05 December 2002
09 November 2011
KR 20060065184 A
14 June 2006
None
Name and mailing address of the ISA/:
National Intellectual Property Administration, PRC
6, Xitucheng Rd., Jimen Bridge, Haidian District, Beijing 100088
China
Facsimile No. (86-10)62019451
Date of the actual completion of the international search:
05 September 2019
Date of mailing of the international search report:
27 September 2019
Authorized officer:
YANG,Yan
Telephone No. 86-(10)-53961450
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