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1. WO2002025695 - TUNABLE FOCUS RING FOR PLASMA PROCESSING

AU2001290735Tunable focus ring for plasma processing
Appl.Date 12.09.2001
Appl.No 2001290735 Applicant Tokyo electron Limited Related Type IC2
National entry of a PCT application.

If this application is not visible in the National Phase tab of the PCT application, its relationship to the PCT application is identified from the PCT or regional filing or publication information of its bibliographic data.

Pub.Kind A
Pub.Date 06.12.2001
WO/2002/025695TUNABLE FOCUS RING FOR PLASMA PROCESSING
Appl.Date 12.09.2001
Appl.No PCT/US2001/028318 Applicant JOHNSON, Wayne, L. Related Type IC1
PCT application from which the family originated.
Pub.Kind A Pub.Lang en
Pub.Date 28.03.2002
US10378992
Appl.Date 05.03.2003
Appl.No 10378992 Related Type IC3
National entry of a PCT application not found in PATENTSCOPE.