(12) International Application Status Report

Received at International Bureau: 14 March 2002 (14.03.2002)

Information valid as of: Not available

Report generated on: 05 March 2021 (05.03.2021)

(10) Publication number: (43) Publication date: (26) Publication language:
WO 2002/04098723 May 2002 (23.05.2002) English (EN)

(21) Application number: (22) Filing date: (25) Filing language:
PCT/US2001/05136513 November 2001 (13.11.2001) English (EN)

(31) Priority number(s): (32) Priority date(s): (33) Priority status:
09/715,359 (US)17 November 2000 (17.11.2000) Priority document received (in compliance with PCT Rule 17.1)

(51) International Patent Classification:
G01N 29/22 (2006.01); G01N 29/28 (2006.01); H01L 21/00 (2006.01); H01L 21/677 (2006.01)

(71) Applicant(s):
SONOSCAN, INC. [US/US]; 2149 E. Pratt Blvd. Elk Grove Village, IL 60007 (US) (for all designated states)

(72) Inventor(s):
ORAVECZ, Michael, G.; 1113 Dickens lane Naperville, IL 60564 (US)
ERICKSON, Daniel, M.; 9245 W. Irving Park Rd. Schiller Park,IL 60176 (US)
MICEK, Daniel, W.; 8251 West Foster Avenue Norridge, IL 60706 (US)

(74) Agent(s):
FELDMAN, Steve, E.; Welsh & Katz, LTD 120 South Riverside Plaza 22nd Floor Chicago, IL 60606 (US)

(54) Title (EN): AUTOMATED ACOUSTIC MICRO IMAGING SYSTEM AND METHOD
(54) Title (FR): SYSTEME ET PROCEDE DE MICRO-IMAGERIE ACOUSTIQUE AUTOMATISES

(57) Abstract:
(EN): An automated acoustic micro imaging system includes a part-storage station (22) favoring a dry environment, a part-transport robot, and a wet-environment inspection station. The wet-environment inspection station (20) has an ultrasonic beam generator, a coupling fluid in which parts are inspected, and a part-retention stage (93). A moisture barrier (52) is located between the wet-environment inspection station and the part-storage station (93) favoring a dry environment. The inspection station includes a kinematic, quick-change part-retaining chuck and robotic means for interchanging chucks. Automatic acoustic micro imaging methods are disclosed.
(FR): L'invention concerne un système de micro-imagerie acoustique automatisé comprenant une station de stockage de partie (22) favorisant une environnement sec, un robot de transport de partie, et une station d'inspection en environnement humide. La station d'inspection en environnement (20) humide comporte un générateur de faisceau ultrasonore, un fluide de couplage dans lequel des parties sont inspectées, et un étage de rétention de partie (93). Un barrière contre l'humidité (52) est disposée entre la station d'inspection en environnement humide et la station de stockage de partie (93) favorisant un environnement sec. La station d'inspection comprend un support de maintien de partie, cinématique, à changement rapide et des moyens robot destinés à interchanger les supports. L'invention concerne aussi des procédés de micro-imagerie acoustique automatisés.

International search report:
Received at International Bureau: 19 April 2002 (19.04.2002) [US]

International Report on Patentability (IPRP) Chapter II of the PCT:
Chapter II demand received: 03 May 2002 (03.05.2002)

(81) Designated States:
AE, AG, AL, AM, AT, AU, AZ, BA, BB, BG, BR, BY, BZ, CA, CH, CN, CO, CR, CU, CZ, DE, DK, DM, DZ, EE, ES, FI, GB, GD, GE, GH, GM, HR, HU, ID, IL, IN, IS, JP, KE, KG, KP, KR, KZ, LC, LK, LR, LS, LT, LU, LV, MA, MD, MG, MK, MN, MW, MX, MZ, NO, NZ, PH, PL, PT, RO, RU, SD, SE, SG, SI, SK, SL, TJ, TM, TR, TT, TZ, UA, UG, UZ, VN, YU, ZA, ZW
European Patent Office (EPO) : AT, BE, CH, CY, DE, DK, ES, FI, FR, GB, GR, IE, IT, LU, MC, NL, PT, SE, TR
African Intellectual Property Organization (OAPI) : BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, ML, MR, NE, SN, TD, TG
African Regional Intellectual Property Organization (ARIPO) : GH, GM, KE, LS, MW, MZ, SD, SL, SZ, TZ, UG, ZW
Eurasian Patent Organization (EAPO) : AM, AZ, BY, KG, KZ, MD, RU, TJ, TM