In Bearbeitung

Bitte warten ...

Einstellungen

Einstellungen

Gehe zu Anmeldung

1. EP3404391 - DRUCKWANDLERSUBSTRAT MIT SELBSTAUSRICHTUNGSFUNKTION

Amt Europäisches Patentamt (EPA)
Aktenzeichen/Anmeldenummer 18174416
Anmeldedatum 07.03.2014
Veröffentlichungsnummer 3404391
Veröffentlichungsdatum 21.11.2018
Veröffentlichungsart B1
IPC
G01L 9/00
GPhysik
01Messen; Prüfen
LMessen von Kraft, mechanischer Spannung, Drehmoment, Arbeit, mechanischer Leistung, mechanischem Wirkungsgrad oder des Drucks von Fluiden
9Messen des stationären oder quasi-stationären Druckes eines Fluids oder eines fließfähigen festen Stoffes durch elektrische oder magnetische, druckempfindliche Elemente; Übertragen oder Anzeigen der Verschiebung druckempfindlicher Elemente, verwendet zum Messen des stationären oder quasi-stationären Druckes eines Fluids oder eines fließfähigen festen Stoffes durch elektrische oder magnetische Einrichtungen
CPC
G01L 9/0042
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
G01L 9/0044
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
0044Constructional details of non-semiconductive diaphragms
G01L 9/0072
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
G01L 9/0073
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
0073using a semiconductive diaphragm
G01L 9/0075
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
0075using a ceramic diaphragm, e.g. alumina, fused quartz, glass
G01L 1/146
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
1Measuring force or stress, in general
14by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
142using capacitors
146for measuring force distributions, e.g. using force arrays
Anmelder SENSATA TECHNOLOGIES INC
Erfinder HOPMAN WICO
VAN DER DONK GEORGE
VAN NOORDEN MAARTEN
DISTEFANO SEAN
Designierte Staaten
Prioritätsdaten 14158388 07.03.2014 EP
201313788255 07.03.2013 US
Titel
(DE) DRUCKWANDLERSUBSTRAT MIT SELBSTAUSRICHTUNGSFUNKTION
(EN) PRESSURE TRANSDUCER SUBSTRATE WITH SELF ALIGNMENT FEATURE
(FR) SUBSTRAT DE TRANSDUCTEUR DE PRESSION COMPORTANT UNE CARACTÉRISTIQUE D'ALIGNEMENT AUTOMATIQUE
Zusammenfassung
(EN)
A method of generating a plurality of diaphragm assemblies, the method comprising: providing a first substrate including a first side with a first protrusion and a second side with a first depression; positioning a first diaphragm on the first protrusion to form a first assembly; providing a second substrate including a first side with a second protrusion and a second side with a second depression; positioning the second substrate on the first assembly such that at least a portion of the first diaphragm and at least a portion of the first protrusion fit within the second depression; positioning a second diaphragm on the first side of the second substrate to form a second assembly; and applying a force to the stacked first and second assemblies to assist in bonding the first and second diaphragms to the first and second substrates, respectively.