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1. CN104034475 - PRESSURE TRANSDUCER SUBSTRATE WITH SELF ALIGNMENT FEATURE

Amt China
Aktenzeichen/Anmeldenummer 201410081215.0
Anmeldedatum 07.03.2014
Veröffentlichungsnummer 104034475
Veröffentlichungsdatum 10.09.2014
Erteilungsnummer 104034475
Erteilungsdatum 24.07.2018
Veröffentlichungsart B
IPC
G01L 9/00
GPhysik
01Messen; Prüfen
LMessen von Kraft, mechanischer Spannung, Drehmoment, Arbeit, mechanischer Leistung, mechanischem Wirkungsgrad oder des Drucks von Fluiden
9Messen des stationären oder quasi-stationären Druckes eines Fluids oder eines fließfähigen festen Stoffes durch elektrische oder magnetische, druckempfindliche Elemente; Übertragen oder Anzeigen der Verschiebung druckempfindlicher Elemente, verwendet zum Messen des stationären oder quasi-stationären Druckes eines Fluids oder eines fließfähigen festen Stoffes durch elektrische oder magnetische Einrichtungen
CPC
G01L 9/0042
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
G01L 9/0044
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
0044Constructional details of non-semiconductive diaphragms
G01L 9/0072
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
G01L 9/0073
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
0073using a semiconductive diaphragm
G01L 9/0075
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
0075using a ceramic diaphragm, e.g. alumina, fused quartz, glass
G01L 1/146
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
1Measuring force or stress, in general
14by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
142using capacitors
146for measuring force distributions, e.g. using force arrays
Anmelder 森萨塔科技公司
Erfinder W·霍普曼
G·范德东克
M·范诺登
S·迪斯特凡诺
Vertreter 中国国际贸易促进委员会专利商标事务所 11038
Prioritätsdaten 13788255 07.03.2013 US
Titel
(EN) PRESSURE TRANSDUCER SUBSTRATE WITH SELF ALIGNMENT FEATURE
(ZH) 具有自调节特征的压力变换器基体
Zusammenfassung
(EN)
The present invention relates to a pressure transducer substrate with self alignment feature. In an embodiment, an apparatus includes a first substrate. The first substrate may have a first side for accommodating a first diaphragm. The first substrate may also have a second side. The second side may include a polygonal-shaped depression that is sized to accommodate a second diaphragm associated with a second substrate. The first substrate and first diaphragm may be included in a first assembly and the second substrate and second diaphragm may be included in a second assembly. The first assembly and the second assembly may be included in a stack where at least a portion of the second diaphragm is positioned to fit inside the polygonal-shaped depression in the stack.

(ZH)
本发明涉及一种具有自调节特征的压力变换器基体。根据本发明的设备在实施例中包括第一基体。第一基体可以具有用于容纳第一隔膜的第一侧面。第一基体还可以具有第二侧面。第二侧面可以包括多边形凹陷部,其尺寸设定为容纳与第二基体相关的第二隔膜。第一基体和第一隔膜被包含在第一组件中,而第二基体和第二隔膜被含包在第二组件中。第一组件和第二组件可以被包含在堆叠体中,其中第二隔膜的至少一部分设置成配合在该堆叠体中的多边形凹陷部内。

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