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1. WO2022073820 - VERFAHREN ZUR MIKROSTRUKTURIERUNG

Veröffentlichungsnummer WO/2022/073820
Veröffentlichungsdatum 14.04.2022
Internationales Aktenzeichen PCT/EP2021/076794
Internationales Anmeldedatum 29.09.2021
IPC
B81C 1/00 2006.1
BSektion B Arbeitsverfahren; Transportieren
81Mikrostrukturtechnik
CVerfahren oder Geräte besonders ausgebildet zur Herstellung oder Behandlung von Mikrostrukturbauelementen oder Mikrostruktursystemen
1Herstellung oder Behandlung von Bauelementen oder Systemen in oder auf einem Substrat
CPC
B81C 1/00206
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
00015for manufacturing microsystems
00206Processes for functionalising a surface, e.g. provide the surface with specific mechanical, chemical or biological properties
B81C 1/00373
BPERFORMING OPERATIONS; TRANSPORTING
81MICROSTRUCTURAL TECHNOLOGY
CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
1Manufacture or treatment of devices or systems in or on a substrate
00349Creating layers of material on a substrate
00373Selective deposition, e.g. printing or microcontact printing
B82Y 40/00
BPERFORMING OPERATIONS; TRANSPORTING
82NANOTECHNOLOGY
YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
40Manufacture or treatment of nanostructures
C23C 14/021
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
02Pretreatment of the material to be coated
021Cleaning or etching treatments
C23C 14/04
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
04Coating on selected surface areas, e.g. using masks
C23C 14/16
CCHEMISTRY; METALLURGY
23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06characterised by the coating material
14Metallic material, boron or silicon
16on metallic substrates or on substrates of boron or silicon
Anmelder
  • FORSCHUNGSVERBUND BERLIN E.V. [DE]/[DE]
Erfinder
  • ERNST, Owen
  • UEBEL, David
  • LANGE, Felix
  • TEUBNER, Thomas
  • SCHRAMM, Hans-Peter
  • BOECK, Torsten
Vertreter
  • GULDE & PARTNER PATENT- UND RECHTSANWALTSKANZLEI MBB
Prioritätsdaten
10 2020 126 553.009.10.2020DE
Veröffentlichungssprache Deutsch (de)
Anmeldesprache Deutsch (DE)
Designierte Staaten
Titel
(DE) VERFAHREN ZUR MIKROSTRUKTURIERUNG
(EN) METHOD FOR MICROSTRUCTURING
(FR) PROCÉDÉ DE MICROSTRUCTURATION
Zusammenfassung
(DE) Die vorliegende Erfindung betrifft ein Verfahren zur Mikrostrukturierung und insbesondere ein Verfahren zur Erzeugung lokal definierter Mikrostrukturen (24) aus Metallen (20) auf Substratoberflächen (12). Ein erfindungsgemäßes Verfahren zur Erzeugung lokal definierter Mikrostrukturen (24) auf Substratoberflächen (12) umfasst das Bereitstellen einer Substratoberfläche (12) mit einem Bereich festgelegter Rauheit (14), das lokale Verringern der Rauheit der Substratoberfläche (12) im Bereich festgelegter Rauheit (14) zur Ausbildung mindestens eines Bereichs verminderter Rauheit (16), das Abscheiden eines Metalls (20) bei einer Temperatur der Substratoberfläche (12) oberhalb des Schmelzpunktes des Metalls (20) zur Ausbildung von lokalisierten Metalltropfen (22) in Bereichen verminderter Rauheit (16) sowie das Abkühlen der Substratoberfläche (12) zum Erstarren der lokalisierten Metalltropfen zu Mikrostrukturen (24) in Bereichen verminderter Rauheit (16).
(EN) The present invention relates to a method for microstructuring and more particularly to a method for producing locally defined microstructures (24) made of metals (20) on substrate surfaces (12). A method according to the invention for producing locally defined microstructures (24) on substrate surfaces (12) comprises: - providing a substrate surface (12) having a region of defined roughness (14); - locally reducing the roughness of the substrate surface (12) in the region of defined roughness (14) in order to form at least one region of reduced roughness (16); - depositing a metal (20) at a temperature of the substrate surface (12) above the melting point of the metal (20) in order to form localized metal drops (22) in regions of reduced roughness (16); and - cooling the substrate surface (12) in order to solidify the localized metal drops to form microstructures (24) in regions of reduced roughness (16).
(FR) La présente invention concerne un procédé de microstructuration et, en particulier, un procédé pour réaliser des microstructures (24) localement définies à partir de métaux (20) sur des surfaces de substrat (12). Un procédé pour réaliser des microstructures (24) localement définies sur des surfaces de substrat (12) selon l’invention comprend les étapes consistant à prendre une surface de substrat (12) ayant une zone à rugosité définie (14), à réduire localement la rugosité de la surface de substrat (12) dans la zone à rugosité définie (14) pour former au moins une zone à rugosité réduite (16), à déposer un métal (20) à une température de la surface de substrat (12) supérieure au point de fusion du métal (20) pour former des gouttes de métal localisées (22) dans des zones à rugosité réduite (16), et à refroidir la surface de substrat (12) pour solidifier les gouttes de métal localisées en microstructures (24) dans des zones à rugosité réduite (16).
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