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1. (WO2019063561) SAMPLE PRE-CHARGING METHODS AND APPARATUSES FOR CHARGED PARTICLE BEAM INSPECTION



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INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/EP2018/075996 2017P00069WO
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
25 September 2018 29 September 2017
Applicant
ASML NETHERLANDS B.V.
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
This International Searching Authority found multiple inventions in this international application, as follows:
1. claims: 1-15
Particle beam apparatus with a condenser lens, two quadrupoles, and an aperture downstream of the quadrupoles.
1.1. claims: 12-15
Method of pre-charging and imaging a sample
1.
As all required additional search fees were timely paid by the applicant, this international search report covers all searchable claims.
2.
As all searchable claims could be searched without effort justifying additional fees, this Authority did not invite payment of additional fees.
3.
As only some of the required additional search fees were timely paid by the applicant, this international search report covers only those claims for which fees were paid, specifically claims Nos.:
4.
No required additional search fees were timely paid by the applicant. Consequently, this international search report is restricted to the invention first mentioned in the claims; it is covered by claims Nos.:
Remark on Protest
The additional search fees were accompanied by the applicant’s protest and, where applicable, the payment of a protest fee.
The additional search fees were accompanied by the applicant’s protest but the applicable protest fee was not paid within the time limit specified in the invitation.
No protest accompanied the payment of additional search fees.
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     2A    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     H01J 37/02 (2006.01)i; H01J 37/04 (2006.01)i; H01J 37/28 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
     H01J
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
EPO-Internal, WPI Data

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2006175548 A1 (KAWASAKI TAKESHI [JP] ET AL) 10 August 2006 (2006-08-10)
1-3,5,6,8-11
A
paragraphs [0024], [0048] - [0052]; figure 6
12-15
(2)
X
US 2004029046 A1 (NAGANO OSAMU [JP] ET AL) 12 February 2004 (2004-02-12)
1,2,4-11
A
paragraphs [0124] - [0132]; figures 5, 6A-6C
12-15
(3)
X
US 2005104006 A1 (YOSHIDA TAKAHO [JP] ET AL) 19 May 2005 (2005-05-19)
1-6,8-11
A
figures 1,3
12-15
(4)
X
US 4075488 A (OKAYAMA SHIGEO ET AL) 21 February 1978 (1978-02-21)
1-3,5,6,8-11
A
figures 5, 14, 17
12-15
(5)
X
WO 0014765 A1 (KLA TENCOR CORP [US]; MASNAGHETTI DOUGLAS K [US]; CONCINA STEFANO E [U) 16 March 2000 (2000-03-16)
12,15
A
page 3, lines 2-13
13,14
(6)
X
US 7994476 B2 (APPLIED MATERIALS ISRAEL LTD [IL]) 09 August 2011 (2011-08-09)
12,15
A
figures 7A-7C
13,14
(7)
X
US 2009084954 A1 (EZUMI MAKOTO [JP] ET AL) 02 April 2009 (2009-04-02)
12,15
A
paragraphs [0071] - [0087]; figures 3, 4,5
13,14
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2006175548 A1
10 August 2006
JP 2006216396 A
US 2006175548 A1
US 2009184243 A1
17 August 2006
10 August 2006
23 July 2009
US 2004029046 A1
12 February 2004
CN 1452014 A
DE 10312989 A1
KR 20040010083 A
TW I262361 B
US 2004029046 A1
29 October 2003
06 November 2003
31 January 2004
21 September 2006
12 February 2004
US 2005104006 A1
19 May 2005
JP 4276929 B2
JP 2005149962 A
US 2005104006 A1
10 June 2009
09 June 2005
19 May 2005
US 4075488 A
21 February 1978
NONE
WO 0014765 A1
16 March 2000
AU 6136799 A
EP 1110233 A1
JP 4974410 B2
JP 2002524827 A
US 6066849 A
WO 0014765 A1
27 March 2000
27 June 2001
11 July 2012
06 August 2002
23 May 2000
16 March 2000
US 7994476 B2
09 August 2011
CN 101499433 A
JP 5465864 B2
JP 2009164109 A
KR 20090046699 A
TW 200933776 A
US 2009114817 A1
05 August 2009
09 April 2014
23 July 2009
11 May 2009
01 August 2009
07 May 2009
US 2009084954 A1
02 April 2009
JP 5696198 B2
JP 2009099540 A
JP 2014038864 A
US 2009084954 A1
US 2011215243 A1
US 2014001359 A1
08 April 2015
07 May 2009
27 February 2014
02 April 2009
08 September 2011
02 January 2014
Name and mailing address of the ISA/:
European Patent Office
P.B. 5818, Patentlaan 2, 2280 HV Rijswijk,
Netherlands
Telephone No. (+31-70)340-2040
Facsimile No. (+31-70)340-3016
Date of the actual completion of the international search:
19 December 2018
Date of mailing of the international search report:
07 January 2019
Authorized officer:
Zuccatti, Stefano
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