Einige Inhalte dieser Anwendung sind momentan nicht verfügbar.
Wenn diese Situation weiterhin besteht, kontaktieren Sie uns bitte unterFeedback&Kontakt
1. (WO2019050659) HIGH QUALITY FACTOR MEMS SILICON HINGE AND SLOT-CUT RESONATOR FOR A VIBRATORY GYROSCOPE
Anmerkung: Text basiert auf automatischer optischer Zeichenerkennung (OCR). Verwenden Sie bitte aus rechtlichen Gründen die PDF-Version.

CLAIMS

1. A resonant structure comprising at least two coaxial rings, wherein:

adjacent coaxial rings have adjacent peripheries and are attached together by a plurality of connection structures regularly arranged along said adjacent peripheries; and

a first ring has a first ring portion with a first radial thickness and a second ring portion, in a vicinity of a first connection structure, with a second radial thickness smaller man said first radial thickness.

2. The resonant structure of claim 1, where the at least two coaxial rings and the plurality of connection structures are formed out of a single plane substrate.

3. The resonant structure of claim 1, wherein said second ring portion is angularly offset to a first side of a radial axis of said first connection structure.

4. The resonant structure of claim 1, wherein an angular thickness of said first connection structure varies along a radial axis of said first connection structure.

5. The resonant structure of claim 1, wherein said first ring portion is aligned with a radial axis of said first connection structure.

6. The resonant structure of claim 3, wherein said second ring portion is formed by a first radial recess developing from a periphery of said first ring distal from said first connection structure toward said first connection structure.

7. The resonant structure of claim 6, wherein the periphery of said first ring, in said second ring portion, follow, along a plane perpendicular to the axis of the rings, portions of a shape selected among:

a circle;

an ellipse; and

a rectangle.

8. The resonant structure of claim 6, comprising:

a second ring concentrically attached to said first ring by said first connection structure; and

third and fourth concentric rings attached together by a second connection structure radially aligned with said first connection structure; wherein the third ring has a third ring portion having a third radial thickness and has a fourth ring portion having a fourth radial thickness smaller than said third radial thickness; the fourth ring portion being radially aligned with the second ring portion;

said fourth ring portion being formed by a second radial recess developing from a periphery of said third ring distal from said second connection structure toward said second connection structure.

9. The resonant structure of claim 8, wherein one of the first and second rings is attached to one of the third and fourth rings by a plurality of regularly arranged connection structures angularly offset from the connection structures attaching the first and second rings.

10. The resonant structure of claim 8, wherein a same number N of connection structures attach each ring to a neighboring ring; and wherein

connection structures attached to the inner and outer periphery of each ring are angularly offset by π/Ν from each other.

11. The resonant structure of claim 8, wherein the first and second radial recesses develop in a same radial direction.

12. The resonant structure of claim 8, wherein the first and second radial recesses develop in opposite radial directions.

13. The resonant structure of claim 6, comprising:

a second ring concentrically attached to said first ring by said first connection structure; wherein the second ring has a third ring portion having a third radial thickness and has a fourth ring portion having a fourth radial thickness smaller than said third radial thickness; the fourth ring portion being radially aligned with the second ring portion;

said fourth ring portion being formed by a second radial recess developing from a periphery of said second ring distal from said first connection structure toward said first connection structure.

14. The resonant structure of claim 6, wherein said first radial recess develops into said first connection structure.

15. The resonant structure of claim 14, wherein said first radial recess develops into a second ring concentrically attached to said first ring by said first connection structure.

16. The resonant structure of claim 3, wherein said first reduced radial thickness is formed by a first radial recess developing from a center of said first connection structure toward a periphery of the first ring distal from said first connection structure.

17. The resonant structure of claim 3, wherein an angular thickness of said first connection structure varies along a radial axis of said first connection structure.

18. A resonant structure comprising a plurality of concentric ring-like structures; each ring like structure comprising a plurality of ring segments of constant radial thickness; and

a plurality of connection structures; each connection structure attaching together the plurality of ring segments of two adjacent ring-like structures; wherein at least one portion of each connection structure has a reduced radial thickness less than the sum of the radial thicknesses of the two adjacent ring-like structures it connects.

19. The resonant structure of claim 18, wherein each connection structure comprises at least two portions of reduced radial thickness arranged symmetrically at equal angular distances from a central portion of the connection structure.

20. The resonant structure of claim 18, wherein said at least one portion of reduced radial thickness is a central portion of the connection structure.