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1. (WO2018080947) LIQUID METAL SENSOR
Anmerkung: Text basiert auf automatischer optischer Zeichenerkennung (OCR). Verwenden Sie bitte aus rechtlichen Gründen die PDF-Version.

CLAIMS

1. A sensor, comprising:

a sensing electrode structure and a motion-responsive structure in capacitive communication with the sensing electrode structure, the sensing electrode structure and the motion-responsive structure being separated by a first dielectric layer,

the motion-responsive structure comprising a liquid metal droplet contained within a matrix in which the liquid metal droplet is movable based upon movement of the sensor, and

the sensing electrode structure comprising

a first liquid metal electrode, and a second liquid metal electrode spaced from the first liquid metal electrode to form a capacitor.

2. The sensor of claim 1, further comprising a second dielectric layer between the first liquid metal electrode and the second liquid metal electrode.

3. The sensor of claim 1, further comprising a first passivating layer on a first side of the sensor, and a second passivating layer on a second side of the sensor.

4. The sensor of claim 1, wherein one or more of the first liquid metal electrode and the second liquid metal electrode comprises gallium and indium.

6. The sensor of claim 1, wherein the matrix comprises a surfactant.

7. The sensor of claim 1, wherein the matrix comprises glycerol.

8. The sensor of claim 1, further comprising a radiofrequency antenna in communication with the first liquid metal electrode and the second liquid metal electrode.

9. The sensor of claim 8, wherein the radiofrequency antenna is formed at least partially from liquid metal.

10. The sensor of claim 1, wherein the sensor is stretchable.

11. A method of making a motion sensor, comprising:

forming a sensing electrode structure;

forming a motion-responsive structure separated from the sensing electrode structure by a first dielectric layer, the motion-responsive structure comprising a liquid metal droplet within a matrix in which the liquid metal droplet can move in response to motion of the sensor; and

forming a passivating layer over the motion-sensing structure.

12. The method of claim 11, wherein forming the sensing electrode structure comprises:

forming a first liquid metal electrode and forming a second liquid metal electrode via spraying liquid metal onto one or more masks defining the sensing electrode structure.

13. The method of claim 12, wherein a first mask is used to define the first liquid metal electrode and a second mask is used to define the second liquid metal electrode.

14. The method of claim 11, wherein forming the motion-responsive structure comprises dispensing a matrix material onto a portion of a different side of the first dielectric layer as the first liquid metal electrode and the second liquid metal electrode, and

dispensing the liquid metal droplet within the matrix material.