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1. (WO2014135448) METHOD FOR ILLUMINATING AN IMAGE FIELD

Pub. No.:    WO/2014/135448    International Application No.:    PCT/EP2014/053917
Publication Date: Sat Sep 13 01:59:59 CEST 2014 International Filing Date: Sat Mar 01 00:59:59 CET 2014
IPC: G03F 7/20
G02B 26/08
Applicants: CARL ZEISS SMT GMBH
Inventors: PATRA, Michael
Title: METHOD FOR ILLUMINATING AN IMAGE FIELD
Abstract:
The invention relates to an illumination optical system (6) for transmitting illumination radiation (7) from a radiation source (5) to an object field (3), comprising at least one mirror unit (20) with a multiplicity of individual mirrors (21) which can be displaced between different displacement positions in a controlled manner and a control device (23) for controlling the displacement of the individual mirrors (21), wherein the control device (23) is configured in such a way that predetermined exclusion positions of the individual mirrors (21) can be excluded from the displacement positions that can be set.