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1. (WO2014000763) METHOD FOR DESIGNING AN ILLUMINATION OPTICS AND ILLUMINATION OPTICS

Pub. No.:    WO/2014/000763    International Application No.:    PCT/EP2012/062254
Publication Date: Sat Jan 04 00:59:59 CET 2014 International Filing Date: Tue Jun 26 01:59:59 CEST 2012
IPC: G03F 7/20
Applicants: CARL ZEISS SMT GMBH
PATRA, Michael
Inventors: PATRA, Michael
Title: METHOD FOR DESIGNING AN ILLUMINATION OPTICS AND ILLUMINATION OPTICS
Abstract:
Method for designing an allocation of pupil facets (11) to field facets (7) of an illumination optics (23) for an EUV-projection exposure system (1) taking into account variations of the corresponding intensity distribution in an imaging pupil at different length scales.