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1. CN109312754 - MASS-SPECTROMETRY LEAK DETECTOR HAVING TURBOMOLECULAR PUMP AND BOOSTER PUMP ON COMMON SHAFT

Amt
China
Aktenzeichen/Anmeldenummer 201780035452.5
Anmeldedatum 13.06.2017
Veröffentlichungsnummer 109312754
Veröffentlichungsdatum 05.02.2019
Erteilungsnummer 109312754
Erteilungsdatum 04.05.2021
Veröffentlichungsart B
IPC
F04D 19/04
FSektion F Maschinenbau; Beleuchtung; Heizung; Waffen; Sprengen
04Verdrängerkraft- und Verdrängerarbeitsmaschinen für Flüssigkeiten; Arbeitsmaschinen für Flüssigkeiten oder Gase, Dämpfe
DStrömungsarbeitsmaschinen
19Lüfter , Gebläse, Verdichter axialer Bauart
02Mehrstufige Gebläse und Verdichter
04zur Erzeugung hohen Vakuums, z.B. Molekularpumpen
G01M 3/20
GSektion G Physik
01Messen; Prüfen
MPrüfen der statischen oder dynamischen Massenverteilung rotierender Teile von Maschinen oder Konstruktionen; Prüfen von Konstruktionsteilen oder Apparaten, soweit nicht anderweitig vorgesehen
3Untersuchen der Dichtheit und Festigkeit von Konstruktionen gegen Fluide
02durch Gas, Flüssigkeit oder Vakuum
04durch Nachweis der Anwesenheit von Gas oder Flüssigkeit an der Leckstelle
20mit besonderen Stoffen zum Ausfindigmachen, z.B. Farbstoff, fluoreszierender Stoff, radioaktiver Stoff
F04D 29/10
FSektion F Maschinenbau; Beleuchtung; Heizung; Waffen; Sprengen
04Verdrängerkraft- und Verdrängerarbeitsmaschinen für Flüssigkeiten; Arbeitsmaschinen für Flüssigkeiten oder Gase, Dämpfe
DStrömungsarbeitsmaschinen
29Einzelheiten, Bauteile oder Zubehör
08Dichtungen
10Wellenabdichtungen
CPC
F04D 19/046
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
19Axial-flow pumps
02Multi-stage pumps
04specially adapted to the production of a high vacuum, e.g. molecular pumps
046Combinations of two or more different types of pumps
F04D 29/104
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
29Details, component parts, or accessories
08Sealings
10Shaft sealings
102especially adapted for elastic fluid pumps
104the sealing fluid being other than the working fluid or being the working fluid treated
G01M 3/205
GPHYSICS
01MEASURING; TESTING
MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
3Investigating fluid-tightness of structures
02by using fluid or vacuum
04by detecting the presence of fluid at the leakage point
20using special tracer materials, e.g. dye, fluorescent material, radioactive material
202using mass spectrometer detection systems
205Accessories or associated equipment; Pump constructions
F04D 25/16
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
25Pumping installations or systems
16Combinations of two or more pumps ; Producing two or more separate gas flows
F04D 19/042
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
19Axial-flow pumps
02Multi-stage pumps
04specially adapted to the production of a high vacuum, e.g. molecular pumps
042Turbomolecular vacuum pumps
F04D 19/04
FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
DNON-POSITIVE-DISPLACEMENT PUMPS
19Axial-flow pumps
02Multi-stage pumps
04specially adapted to the production of a high vacuum, e.g. molecular pumps
Anmelder INFICON GMBH
英福康有限责任公司
Erfinder GROSSE BLEY WERNER
维尔纳·格罗塞·布莱
BOHM THOMAS
托马斯·博姆
BRUHNS HJALMAR
亚尔马尔·布鲁恩斯
Vertreter 深圳中一联合知识产权代理有限公司 44414
Prioritätsdaten 102016210701 15.06.2016 DE
Titel
(EN) MASS-SPECTROMETRY LEAK DETECTOR HAVING TURBOMOLECULAR PUMP AND BOOSTER PUMP ON COMMON SHAFT
(ZH) 带有同轴的涡轮分子泵和增压泵的质谱检漏仪
Zusammenfassung
(EN) The invention relates to a mass-spectrometry leak detector, comprising a multi-stage turbomolecular pump (12), a mass spectrometer (17) connected to the suction side of the turbomolecular pump (12), apreliminary vacuum pump (18) connected to the pressure side of the turbomolecular pump (12), and a booster pump stage (24), the suction side of which has a connection (28) for a test object to be tested and the pressure side of which is connected to the pressure side of the turbomolecular pump (12) and to the suction side of the preliminary vacuum pump (18) by means of a gas line path (22), characterized in that the stages (30, 32) of the turbomolecular pump (12) and the booster pump stage are arranged on a common shaft and have a common drive (34) and the gas line path is interrupted, by means of a separation (36), between the pressure side of the booster pump stage, which booster pump stage can be connected to the test object, and the suction of the pump stage of the turbomolecular pump(12) connected to the mass spectrometer (17).
(ZH) 本发明涉及一种质谱检漏仪,包括:多级涡轮分子泵(12),连接到所述涡轮分子泵(12)的吸入侧的质谱仪(17),连接到所述涡轮分子泵(12)的压力侧的初级真空泵(18),以及增压泵级(24),其中,所述增压泵级(24)的吸入侧具有用于待测试对象的连接器(28),所述增压泵级(24)的压力侧通过气体管线路径(22)连接到所述涡轮分子泵(12)的所述压力侧和所述初级真空泵(18)的吸入侧。其特征在于:所述涡轮分子泵(12)的泵级(30,32)和所述增压泵级设置在同一个轴上并具有共同的驱动器(34);以及隔离件(36)中断在适于连接到所述测试对象的所述增压泵级的所述压力侧与连接到所述质谱仪(17)的所述涡轮分子泵(12)的泵级的吸入侧之间的气体传导路径。