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1. JP2014174169 - PRESSURE TRANSDUCER SUBSTRATE WITH SELF-ALIGNMENT FEATURE

Amt Japan
Aktenzeichen/Anmeldenummer 2014042269
Anmeldedatum 05.03.2014
Veröffentlichungsnummer 2014174169
Veröffentlichungsdatum 22.09.2014
Erteilungsnummer 6203082
Erteilungsdatum 08.09.2017
Veröffentlichungsart A5
IPC
G01L 9/00
GPhysik
01Messen; Prüfen
LMessen von Kraft, mechanischer Spannung, Drehmoment, Arbeit, mechanischer Leistung, mechanischem Wirkungsgrad oder des Drucks von Fluiden
9Messen des stationären oder quasi-stationären Druckes eines Fluids oder eines fließfähigen festen Stoffes durch elektrische oder magnetische, druckempfindliche Elemente; Übertragen oder Anzeigen der Verschiebung druckempfindlicher Elemente, verwendet zum Messen des stationären oder quasi-stationären Druckes eines Fluids oder eines fließfähigen festen Stoffes durch elektrische oder magnetische Einrichtungen
G01L 7/08
GPhysik
01Messen; Prüfen
LMessen von Kraft, mechanischer Spannung, Drehmoment, Arbeit, mechanischer Leistung, mechanischem Wirkungsgrad oder des Drucks von Fluiden
7Messen des stationären oder quasi-stationären Druckes eines Fluids oder eines fließfähigen festen Stoffes durch mechanische oder auf den Druck von Fluiden ansprechende Elemente
02in der Form von elastisch-verformbaren Bauteilen
08mit biegsamen Membranen
CPC
G01L 9/0042
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
G01L 9/0044
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0042Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
0044Constructional details of non-semiconductive diaphragms
G01L 9/0072
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
G01L 9/0073
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
0073using a semiconductive diaphragm
G01L 9/0075
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
9Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements
0041Transmitting or indicating the displacement of flexible diaphragms
0072using variations in capacitance
0075using a ceramic diaphragm, e.g. alumina, fused quartz, glass
G01L 1/146
GPHYSICS
01MEASURING; TESTING
LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
1Measuring force or stress, in general
14by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
142using capacitors
146for measuring force distributions, e.g. using force arrays
Anmelder SENSATA TECHNOLOGIES INC
センサータ テクノロジーズ インコーポレーテッド
Erfinder WICO HOPMAN
ウィコ ホプマン
GEORGE VAN DER DONK
ヘオルヘ ファン デル ドンク
MAARTEN VAN NORDEN
マールテン ファン ノールデン
SEAN DISTEFANO
ショーン ディ ステファノ
Vertreter 片寄 恭三
Prioritätsdaten 13/788,255 07.03.2013 US
Titel
(EN) PRESSURE TRANSDUCER SUBSTRATE WITH SELF-ALIGNMENT FEATURE
(JA) 自己整合特徴を有する圧力トランスデューサ基板
Zusammenfassung
(EN)

PROBLEM TO BE SOLVED: To provide a pressure transducer which wears well in a heated environment.

SOLUTION: A first substrate 210a has a first side surface for accommodating a first diaphragm 110a. The first substrate 210a may also have a second side surface. The second side surface may include a polygon-shaped depression having such a size that a second diaphragm 110b associated with a second substrate 210b is accommodated. The first substrate 210a and first diaphragm 110a may be included in a first assembly 510a, and the second substrate 210b and the second diaphragm 110b may be included in a second assembly 510b. The first assembly 510a and the second assembly 510b may be included in a stack, and at least a portion of the second diaphragm is positioned so as to fit to the inside of the polygon-shaped depression in the stack.

COPYRIGHT: (C)2014,JPO&INPIT

(JA)

【課題】熱せられた環境での使用に耐える圧力トランスデゥーサを提供する。
【解決手段】第1の基板210aは第1のダイアフラム110aを収容するための第1の側面を有する。第1の基板210aは、第2の側面を含むこともできる。第2の側面は、第2の基板210bに関連された第2のダイアフラム110bを収容する大きさの多角形状の窪みを含み得る。第1の基板210aおよび第1のダイアフラム110aは第1のアッセンブリ510a内に含まれ得、第2の基板210bおよび第2のダイアフラム110bは第2のアッセンブリ510b内に含まれ得る。第1のアッセンブリ510aおよび第2のアッセンブリ510bはスタック内に含まれ得、第2のダイアフラムの少なくとも一部は、当該スタック内の多角形状の窪みの内側に適合するよう位置決めされる。
【選択図】図5

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