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1. WO2004097882 - MEMBRANE, TRANSPARENT FOR PARTICLE BEAMS, WITH IMPROVED EMISSITY OF ELECTROMAGNETIC RADIATION

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[ EN ]

Claims

1. A membrane (10, 20, 30, 40, 50) being substantially transparent for particle beams (5) or electromagnetic radiation, being made from materials whose chemical

! elements primarily have a small atomic number, and being able to withstand pressure differences greater than 1 mbar
characterized in that
the membrane (10, 20, 30, 40, 50) comprises at least one layer (17, 27, 37, 40, 56) having a high emissivity of electromagnetic radiation.
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2. A membrane (10, 20, 30, 40, 50) according to claim 1, wherein the particle beam is an electron beam.

3. A membrane (10, 20, 30, 40, 50) according to claim 2, wherein the energy of the 5 electrons is less than 100 keV.

4. A membrane (10, 20, 30, 40, 50) according to claim 1, wherein the particle beam is an ion beam.

,0 5. A membrane (10, 20, 30, 40, 50) according to claims 1, wherein said electromagnetic radiation comprises radiation with wavelengths shorter than or equal to X-rays or radiation with wavelengths longer than or equal to microwaves.

6. A membrane (10, 20, 30, 40, 50) according to claim 1, wherein said pressure 5 difference the membrane (10, 20, 30, 40, 50) is able to withstand is greater than

100 mbar.

7. A membrane (10, 20, 30, 40, 50) according to claim 1, wherein the thickness of the membrane (10, 20, 30, 40, 50) is less than 1 μm.
0
A membrane (10, 20, 30, 40, 50) according to claim 1, wherein the thickness of the membrane (10, 20, 30, 40, 50) is less than 400 nm.

9. A membrane (10, 20, 30, 40, 50) according to claim 1, wherein said at least one layer (17, 27, 37, 40, 56) having a high emissivity of electromagnetic radiation consists substantially of chemical elements from the group of carbon, beryllium, boron.
i
10. A membrane (10, 20, 30, 40, 50) according to claim 1, wherein said at least one layer (17, 27, 37, 40, 56) having a high emissivity of electromagnetic radiation consists substantially of carbon black or fullerenes.

3 11. A membrane (10, 20, 30) according to claim 1, wherein the membrane (10, 20, 30) comprises at least one further layer (16, 26, 36) having a low emissivity of electromagnetic radiation.

12. A membrane (10, 20, 30) according to claim 11, wherein the at least one layer (16, 5 26, 36) having a low emissivity of electromagnetic radiation is made from silicon nitride or from diamond.

13. A membrane (10, 20, 30) according to claim 11, wherein said at least one layer (17, 27, 37) having a high emissivity of electromagnetic radiation is applied to said at

,0 least one layer (16, 26, 36) having a low emissivity of electromagnetic radiation by a method for producing carbon or hydrocarbon films with varying content of graphite-like (sp2) and diamond-like (sp3) chemical bonds.

14. A membrane (10, 20, 30) according to claim 13, wherein said method is thermal -5 evaporation-condensation or laser plasma ablation-deposition or laser induced arc.

15. A membrane (10, 20, 30) according to claim 11, wherein a thin diamond layer is applied to said at least one layer (16, 26, 36) having a low emissivity of electromagnetic radiation before said at least one layer (17, 27, 37) having a high 0 emissivity of electromagnetic radiation is applied.

16. A membrane (10, 20, 30) according to claim 11, wherein said at least one layer (16, 26, 36) having a low emissivity of electromagnetic radiation is removed in those areas where the particle beam (5) or the electromagnetic radiation is to be transmitted through the membrane (10, 20, 30).

17. A membrane (30, 50) according to claim 1, wherein at least one functional layer (38, 57) is applied to said at least one layer (37, 56) having a high emissivity of electromagnetic radiation.

18. A membrane (30, 50) according to claim 17, wherein the functional layer or at least one of the functional layers (38, 57) is a protective layer.

19. A membrane (30, 50) according to claim 18, wherein the at least one protective layer (38, 57) is made of silicon nitride.

20. A membrane (10, 20, 30, 40, 50) according to claim 1, wherein the emissivity of said at least one layer (17, 27, 37, 40, 56) having a high emissivity of electromagnetic radiation is increased by thermal treatment of the membrane.

21. A method for producing a membrane (10, 20, 30) according to claim 11 comprising the steps of
depositing one or more layers (17, 27, 37) consisting of chemical elements from the group of carbon, beryllium, or boron onto a substrate (16, 26, 36) by laser beam evaporation-condensation and
heating the membrane (10, 20, 30) resulting from the step above to increase the emissivity of electromagnetic radiation of the one or more layers (17, 27, 37) deposited by laser beam evaporation-condensation.

22. A light source comprising a first chamber with an electron source for generating an electron beam and a second chamber adjacent to the first chamber and filled with a pressurized gas emitting light when the electron beam is directed into the gas
characterised in that
the electron beam is transmitted from the first chamber to the second chamber through a membrane (10, 20, 30, 40, 50) according to any of the above claims.

23. A light source according to claim 22, wherein said electron source is operated continuously.

24. A light source according to claim 22, wherein said electron source is operated in a pulsed mode.

25. A light source according to claim 22, wherein the light emitted from said light source comprises light of the vacuum ultra violet (NUN) range of the electromagnetic spectrum.
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