PROBLEM TO BE SOLVED: To form an amorphous nitrided carbon film superior in electrical conductivity, corrosion resistance and adhesiveness.

SOLUTION: The method for manufacturing a composite of an amorphous nitrided carbon film with a substrate having an amorphous nitrided carbon film with high conductivity thereon, comprises (1) immersing a substrate in methane gas plasma in a vacuum chamber, irradiating the substrate with positive ions in the plasma, and forming an ion-implanted layer in a surface layer; (2) introducing a mixed gas of hydrocarbon and nitrogen to the vacuum chamber, generating the plasma, depositing the radicals on the substrate, applying a negative voltage to the substrate, and irradiating the substrate with the accelerated positive ions; (3) at the same time, applying a high-voltage positive pulse (0.5 to 15 kV) to the substrate, and irradiating the substrate with electrons in the plasma, to activate only the surface layer with the pulse and convert it into a high-temperature state; and (4) depositing the radicals and ions of hydrocarbon and nitrogen on the substrate by the steps described above.

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