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1. (WO2019032730) VARIABLE APERTURE MASK



إنذار إنذار الإصدار المصور (PDF) المتاح في ركن البراءات الإلكتروني هو الإصدار الرسمي. يتاح هذا الإصدار في نسق html على الإنترنت لمساعدة المستخدمين. بالرغم من العناية الكبيرة التي أوليت لعملية التجميع بغية ضمان تمثيل دقيق ومضبوط للبيانات التي تتضمنها الوثيقة المطبوعة أو الصور، لا يمكن استبعاد حدوث أخطاء أو سهو نتيجة إجراءات إرسال البيانات وتحويلها، وطبيعة القيود التي تفرضها عمليات الترجمة الآلية التي يمكن أن تستخدم (اختيارياً). إن روابط البحث المتبوعة بالرمز هي موارد خارجية لا تتحكم فيها الويبو. تخلي الويبو أية مسؤولية بشأن النقاط السابق ذكرها.

INTERNATIONAL SEARCH REPORT (ISR)
Part 1:  1  2  3  4  5  6          Part 2:  A  B  C  D  E 
International application No. Applicant's or agent's file reference
PCT/US2018/045852 P5158-PCT
International filing date (day/month/year) (Earliest) Priority Date (day/month/year)
08 August 2018 09 August 2017
Applicant
KLA-TENCOR CORPORATION
FOR FURTHER ACTION: See Form PCT/ISA/220 as well as, where applicable, item 5 below.
This international search report has been prepared by this International Searching Authority and is transmitted to the applicant according to Article 18. A copy is being transmitted to the International Bureau.
It is also accompanied by a copy of each prior art document cited in this report.
1. Basis of the report
a. With regard to the language, the international search was carried out on the basis of:
the international application in the language in which it was filed.
a translation of the international application into                                          which is the language of a translation furnished for the purposes of international search (Rules 12.3(a) and 23.1(b)).
b.
This international search report has been established taking into account the rectification of an obvious mistake authorized by or notified to this Authority under Rule 91 (Rule 43.6bis(a)).
c.
With regard to any nucleotide and/or amino acid sequence disclosed in the international application, the international search was carried out on the basis of a sequence listing:
2. Certain claims were found unsearchable
3. Unity of invention is lacking
4. Title of the invention
The text is approved as submitted by the applicant.
The text has been established by this Authority to read as follows:
5. Abstract
The text is approved as submitted by the applicant.
The text has been established, according to Rule 38.2, by this Authority as it appears in Box No. IV. The applicant may, within one month from the date of mailing of this international search report, submit comments to this Authority.
6. Drawings
a.
The figure of the drawings to be published with the abstract is Figure No.     2    
as suggested by the applicant.
as selected by this Authority, because the applicant failed to suggest a figure.
as selected by this Authority, because this figure better characterizes the invention.
b.
none of the figures is to be published with the abstract.

A. CLASSIFICATION OF SUBJECT MATTER

     G03F 7/20 (2006.01)i; G03F 1/84 (2012.01)i; H01L 21/66 (2006.01)i; H01L 21/67 (2006.01)i
According to International Patent Classification (IPC) or to both national classification and IPC

B. FIELDS SEARCHED

Minimum documentation searched (classification system followed by classification symbols):
Documentation searched other than minimum documentation to the extent that such documents are included in the fields searched:
Korean utility models and applications for utility modelsJapanese utility models and applications for utility models
Electronic data base consulted during the international search (name of data base and, where practicable, search terms used):
eKOMPASS(KIPO internal) & Keywords: frame, aperture mask, plate, spectrometer, rotatable

C. DOCUMENTS CONSIDERED TO BE RELEVANT

Category* Citation of document, with indication, where appropriate, of the relevant passages Relevant to claim No.
(1)
X
US 2008-0055592 A1 (NAKAMURA, K. et al.) 06 March 2008 See paragraphs [0039]-[0062] and figures 1-3.
1
Y
2-9,16
A
10-15,17-23
(2)
X
US 2008-0049220 A1 (IZZIA, F. et al.) 28 February 2008 See paragraphs [0009]-[0039], claim 1 and figures 1-4.
10-15,17-21
Y
2-9,16,22,23
(3)
Y
US 2012-0086795 A1 (WEISS, A. et al.) 12 April 2012 See paragraphs [0052]-[0064], claim 1 and figures 1-3.
22,23
(4)
A
US 2008-0013086 A1 (DECK, F. J.) 17 January 2008 See paragraphs [0006]-[0017] and figures 1A-2.
1-23
(5)
A
JP 2000-121553 A (SHIMADZU CORP.) 28 April 2000 See paragraphs [0008], [0009] and figures 1-3.
1-23
*
Special categories of cited documents:
"A"
document defining the general state of the art which is not considered to be of particular relevance
"E"
earlier application or patent but published on or after the international filing date
"L"
document which may throw doubts on priority claim(s) or which is cited to establish the publication date of another citation or other special reason (as specified)
"O"
document referring to an oral disclosure, use, exhibition or other means
"P"
document published prior to the international filing date but later than the priority date claimed
"T"
later document published after the international filing date or priority date and not in conflict with the application but cited to understand the principle or theory underlying the invention
"X"
document of particular relevance; the claimed invention cannot be considered novel or cannot be considered to involve an inventive step when the document is taken alone
"Y"
document of particular relevance; the claimed invention cannot be considered to involve an inventive step when the document is combined with one or more other such documents, such combination being obvious to a person skilled in the art
"&"
document member of the same patent family

D. INFORMATION ON PATENT FAMILY MEMBERS

Patent document cited in search report Publication date
(day/month/year)
Patent family member(s) Publication date
(day/month/year)
US 2008-0055592 A1
06 March 2008
CN 101135784 A
DE 102007040839 A1
JP 2008-058091 A
JP 4358848 B2
KR 10-1379531 B1
KR 10-2008-0020528 A
PL 383166 A1
TW 200815743 A
TW I458950 B
US 7808625 B2
05 March 2008
06 March 2008
13 March 2008
04 November 2009
31 March 2014
05 March 2008
03 March 2008
01 April 2008
01 November 2014
05 October 2010
US 2008-0049220 A1
28 February 2008
EP 2057582 A2
EP 2057582 A4
JP 2010-502956 A
JP 5507247 B2
US 7496220 B2
WO 2008-027927 A2
WO 2008-027927 A3
13 May 2009
31 August 2011
28 January 2010
28 May 2014
24 February 2009
06 March 2008
20 November 2008
US 2012-0086795 A1
12 April 2012
CN 102445750 A
CN 102445750 B
DE 102010042351 A1
DE 102010042351 B4
JP 2012-083755 A
JP 5764455 B2
US 9250432 B2
09 May 2012
13 April 2016
12 April 2012
13 February 2014
26 April 2012
19 August 2015
02 February 2016
US 2008-0013086 A1
17 January 2008
US 7483135 B2
WO 2008-008654 A2
WO 2008-008654 A3
WO 2008-008654 A9
27 January 2009
17 January 2008
18 September 2008
25 November 2010
JP 2000-121553 A
28 April 2000
None
Name and mailing address of the ISA/:
Korean Intellectual Property Office
189 Cheongsa-ro, Seo-gu, Daejeon Metropolitan City, 302-701
Republic of Korea
Facsimile No. +82-42-481-8578
Date of the actual completion of the international search:
26 November 2018
Date of mailing of the international search report:
26 November 2018
Authorized officer:
LEE, Ki Cheul
Telephone No. +82-42-481-3353
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