البحث في مجموعات البراءات الوطنية والدولية

1. (WO2008121628) APPARATUS AND METHODS FOR SYSTEMATIC NON-UNIFORMITY CORRECTION USING A GAS CLUSTER ION BEAM

Pub. No.:    WO/2008/121628    International Application No.:    PCT/US2008/058171
Publication Date: Fri Oct 10 01:59:59 CEST 2008 International Filing Date: Thu Mar 27 00:59:59 CET 2008
IPC: H01L 21/66
Applicants: TEL EPION INC.
CALIENDO, Steven
HOFMEESTER, Nicolaus
Inventors: CALIENDO, Steven
HOFMEESTER, Nicolaus
Title: APPARATUS AND METHODS FOR SYSTEMATIC NON-UNIFORMITY CORRECTION USING A GAS CLUSTER ION BEAM
Abstract:
Embodiments of an apparatus and methods for correcting systematic non- uniformities using a gas cluster ion beam (202) are generally described herein. Other embodiments may be described and claimed.